Air Slide Table Series MXS

x 10 M4 x 12 M5 x 18 M6 x 20 M8 x 25 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 4.4 7.0 M2.5 x 10 M3 x 12 M4 x 15 M5 x 18 M6 x 20 M8 x 25 M2.5 x 8 M3 x 10 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Shock Absorber Caution 1.

Air Slide Table Series MXQ

x 10 M4 x 12 M5 x 16 M6 x 20 M8 x 20 M2.5 x 6 M3 x 8 M4 x 12 M5 x 16 M6 x 16 M8 x 18 0.5 0.9 2.1 4.4 4.4 7.0 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 7.0 18.0 M2.5 x 6 M3 x 8 M4 x 10 M5 x 12 M5 x 14 M6 x 18 Individual -X 131 Series MXQ Specific Product Precautions 4 Be sure to read before handling.

Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

MY1

Do not use a shock absorber and air cushion together. 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 m2, m3 max. m1 max. m2 max. m3 max. m1 max.

A

21 (72) 35 94 5 30 4-M4x0.7 MHQJ2-2572 10 33 19 4-M6x1.0 12 5.1 26 (85) 35.5 112 3.9 36 4-M5x0.8 0 P Q R S T U V W X Y Z AA BB CC 5 0-0.1 3 5.7 15 10 26 22 6 11 M3x0.5 M3x0.5 6 26 34 12 8 0-0.1 4 7 19 13 28 22 10 11 M5x0.8 M5x0.8 10 34 46 15 10 0-0.1 5 9 23 18 31 25 12 10 M5x0.8 M5x0.8 14 44 57 18 12 0-0.1 6 12 29 25 31 25 14 10 M5x0.8 M5x0.8 16 53 72 22 DD EE FF GG HH II 25 2-M3x0.5 6 18

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 14 17 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234 L SB 14 17.5 SA 9 11 R 118 148 NB SC 31 32 Q 23 31 NA 37 43 O 7.5 10.5 TA M8 x 1.25 M 4 6 P

Table of Contents

Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10. Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

Basic type / Direct mount type Series CY3B/CY3R

CY1H25 (Nm) 64 56 CY3B CY3R 50 40 50 40 30 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H10 CY1H15 CY1H20 Model CY1H25 CY1HT25 CY1HT32 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm CY1S 10 10 2 2.5 3 4 5 3 4 5 CY1H10 CY1L M3 2 CY1H10 1.5 1 1 CY1H 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s CY1F

CRB2/CRBU2/CRB1

R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Compact Cylinder Series CQS

x 30L M3 x 35L M3 x 40L M3 x 45L M3 x 50L M3 x 55L M3 x 60L M3 x 65L M3 x 70L 25 30 35 40 45 50 M3 x 25L M3 x 30L M3 x 35L M3 x 40L M3 x 45L M3 x 50L M3 6.5 6.5 Mounting bolt Secure the cylinder by using the OA screws that are provided with the cylinder tube.

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

F

Applicable Connection Thread Model H (Width D1 D2 L1 L2 A M Effective Tube OD mm Uni Thread Across Flats) Orifice (mm 2) Nylon 4 18 KQK04-U01 10 10.4 10 17 18.5 30 16 3.4 4 14 KQK04-U02 14 10.4 10 17 20.5 30.5 16 3.4 6 18 KQK06-U01 10 12.8 10 18 18.5 31 17 8.7 6 14 KQK06-U02 14 12.8 10 18 20.5 31 17 8.7 6 38 KQK06-U03 17 12.8 10 18 21.5 32 17 8.7 8 18 KQK08-U01 12 15.2 12 20.5 20 35 18.5

REA/REB

PA Model HS PW LD M N PB L JK NN P MM HT J High Precision Guide Type REBH Order Made Auto Switches REAL15 REAL20 REAL25 REAL32 REAL40 7.5 70 95 8 45 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 120 5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

0.5

[mm] 10 Fan Type Ionizer IZF21/31 Series RoHS How to Order IZF 21 B Model Air suction side filter Nil None U With filter1 Symbol Max. air flow 21 1.8 m3/min 31 4.4 m3/min 1: Filter + Filter holder Automatic cleaning unit, Louver (Refer to page 12 for detail.)