High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

0.4

Red Power supply terminal block (Terminal screw M3) Indicator light VV5Q11 Terminal no. SI unit made by OMRON Corp. Mountable for G71-OD16 (Order separately) Flat Ribbon Cable Connector Assembly D side D side Stations Note Assembly part no.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

SV

Specified layout (Up to 8 solenoids possible.) 18 08 20 08 18 stations 8 stations 20 stations 8 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations (1) (1) Double wiring specifications Double wiring specifications 09 02 09 02 9 stations 9 stations 2 stations 2 stations (2) (2) Specified layout (Up to 18 solenoids possible.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M3 x 0.5, thread depth 4 (For mounting bracket) 38 9.5 31 4 13.1 1.2 11.6 17 24 + 66.9 [69.1] G: Approx. 300 H: Approx. 600 (For mounting) 2 x 3.2 28.5 [35.5] (Lead wire length) 44.7 25 8.6 B A 10.2 Manual override 2 x 2.2 (For manifold mounting) 21.4 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 69.4 [71.6] (35

90

Air consumption (per unit) 0.058 m3/min (ANR) 0.085 m3/min (ANR) J (= Unit of conversion of A) Air consumption (for total operation) 6,525 m3/year 95,625 m3/year K = J x 60 x I Power consumption 2 0.19 kW 0.27 kW L (Theoretical value obtained from A and B) Power consumption cost per year 5,344 yen/year 75,938 yen/year M = C x I x L 1 Adsorption time is the time in a cycle when the ejector

ARM10/11

G Panel cutout dimensions PPA 23 28 SMC K P C U O S H L AL 28 26(Max.28) Plate thickness: Max.2.1 25 22 Through hole for M3 3.2 42 59.5 73.5 SMC 2 10.5 35 OUT IN 12 14-4-43 26 Series ARM10 Dimensions Panel cutout dimensions ARM10F1-06 08 28 4-R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max.2.1 22 5 15 34 14 31 SMC 62 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ARM10/11

G Panel cutout dimensions PPA 23 28 SMC K P C U O S H L AL 28 26(Max.28) Plate thickness: Max.2.1 25 22 Through hole for M3 3.2 42 59.5 73.5 SMC 2 10.5 35 OUT IN 12 14-4-43 26 Series ARM10 Dimensions Panel cutout dimensions ARM10F1-06 08 28 4-R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max.2.1 22 5 15 34 14 31 SMC 62 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

7.5

Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat ribbon cable (PC wiring, with power supply terminal) Symbol Stations 02 08 2 stations 8 stations SS3J3-V60PD2-06D 1 set (Manifold part no.)

Compact Cylinder with Lock Series CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 P.31 DIN rail AXT100-DR-l Piping specifications Applicable solenoid valve Bore size Applicable stations Piping direction Series Base model P.31 1(P), 3(R) 2(A) Silencer (for EXH port) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Side/ top VQZ115 VQZ100 2 to 20 stations VV3QZ15-lll C4 (for 4) C6 (for 6) C8 (for 8) Rc 1/8 Rc

IZx-OMP0064

Recommended piping port size Emitter cartridge Bar length mm One-touch Applicable tube type fitting symbol O.D. mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10

One-touch Fittings

3/16 R1/8 KQ2H05-01S1 Male connector Operating Environment Warning 4 M3 x 0.5 KQ2F04-M31 4 M5 x 0.8 KQ2F04-M51 6 M5 x 0.8 KQ2F06-M51 1/8 10-32UNF KQ2F01-321 5/32 10-32UNF KQ2F03-321 1/8 M3 x 0.5 KQ2F23-M31 1/8 M5 x 0.8 KQ2F23-M51 1.