SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting Method: None, US Option: Preferred US Option for DeviceNet Type

SI Unit: w/o SI Unit, Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: -

SI Unit: CANopen, Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: -

Enclosure: W (IP67), SI Unit: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)

Enclosure: None (IP40), SI Unit: NC (PROFIBUS DP - 32 Outputs - Connector D-sub), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)

Enclosure: IP67, SI Unit: DeviceNetâ„¢ - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: DIN Rail Mount w/o DIN Rail, DIN Rail Option: -

Enclosure: None (IP40), SI Unit: PROFIBUS DP - 32 Outputs - Connector D-sub, SI Unit Output Polarity: -COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: DIN Rail Mount w/o DIN Rail, DIN Rail Option: -

Enclosure: IP67, SI Unit: PROFIBUS DP - 32 Outputs - Connector D-sub, SI Unit Output Polarity: -COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: DIN Rail Mount w/o DIN Rail, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: +COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: for 17 Stations; Longer Rail than Total Length of Specified Valve Stations

Enclosure: IP67, SI Unit: PROFINET, End Plate Type: Power Supply with M12 Connector, Max. Supplied Current 2 A, SI Unit Common: Negative Common, I/O Unit Stations: None, Valve Stations: 16 Stations, P, E Port Location: Both Sides, SUP/EXH Block Assy: Internal Pilot, A, B Port Size: 1/8" One-touch Fitting, Mounting: DIN Rail Mounting, w/DIN Rail, DIN Rail Option: for 17 Stations; Longer Rail

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)

Enclosure: W (IP67), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 17 (for 17 Stations; Longer Rail than Total Length of Specified Valve Stations)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Enclosure: W (IP67), SI Unit: NC (PROFIBUS DP - 32 Outputs - Connector D-sub), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)

Electric Actuator with Integrated Guide

reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

High Vacuum Angle Valve

D-G

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

0.4

(D-sub connector) y u @0 i o !