Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 03 (3 Stations), P, E Port Locations: U (U Side, 2-10 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 4 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: -

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 8 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: -

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: -

Series: 10-SV4000, Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø3/8, Mounting: -

Series: 10-SV1000, Enclosure: W10CD, Valve Stations: 8 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: -

Series: 10-SV1000, Enclosure: W10CD, Valve Stations: 6 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: -

Series: 10-SV3000, Enclosure: W10CD, Valve Stations: 7 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø3/8, Mounting: -

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 5 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: DIN Rail Mounting w/DIN Rail

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 3 Stations, P, E Port Locations: U Side, 2-10 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø5/32, Mounting: -

Series: 1 (10-SV1000), Enclosure: W10CD, Valve Stations: 08 (8 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Electric Actuator with Integrated Guide

reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

Compact 5-Port Solenoid Valve

D D 64.5 3/5 B 2 E 3/5 58.7 E B 2 B 2 B 2 B 2 1 P P 1 4 A 4 A 4 A 4 A 4 A S Built-in silencer P, E port entry: D Calculation formula for L dimensions L = 6.5 x n1 + 9 x n2 + 39.6 Silencer (Exhaust port) (Built-in silencer specification) n1: Number of 6.5 mm pitch manifold block stations (Applicable fitting: 2, 4) n2: Number of 9 mm pitch manifold block stations (Applicable

LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

High Vacuum Angle Valve

D-G

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

0.4

(D-sub connector) y u @0 i o !

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Table of Contents

C D E F Dimensions Part no.