MGQ

, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 Bore size (mm) 32 40 50 63 80 100 32 40 50 63 80 100 71.5 71.5 81 81 93 105 20 20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

error 63.1 STO1 off DB 63.2 STO2 off DB 8 5 8.

CQS

Hard anodized Aluminum alloy Cylinder tube q Anodized Aluminum alloy Collar w Chromated Aluminum alloy Piston e Stainless steel Piston rod r Phosphate coated Snap ring Carbon tool steel t Nickel plated Rod end nut Carbon steel y Replacement Parts: Seal Kit Chromated Aluminum alloy Spacer for switch type u Urethane Bumper A i Bore size (mm) 12 16 20 25 Kit no.

LEC-OM07605CN

12.2 RAM2 DB 12.3 RAM3 DB 12 1(RAM) 12.4 RAM4 DB 12.5 RAM5 DB 13 13.1 1 DB 13.2 2 DB 14.1 1 DB 14.2 2 DB 14.3 3 DB 14.4 4 DB 14.5 5 DB 14 14.6 6 DB 14.7 7 DB 14.8 8 DB 14.9 9 DB 14.A 10 DB 15 2 15.1 EEP-ROM DB (EEP-ROM) 15.2 EEP-ROM DB 16.1 1 DB 16.2 2 DB 16.3 3 DB 16.5 1 DB 16.6 2 DB 16.7 3 DB 16 1 16.A 1 DB 16.B 2 DB 16.C 3 DB 16.D 4 DB 16.E 5 DB 16.F 6 DB 8 2 8.

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety

MLU

8 RLQ MLU ML1C DB At the time of shipment -X @7 20Data Retraction locking C M(D)LUB25 Component Parts Description Material Note Description Material Note No. q w e r t y u i o !0 !1 !2 No. !5 !6 !7 !8 !

Compact Proportional Solenoid Valve Series PVQ

(Minimum operating pressure 0.1 Paabs) Operation noise during opening/ closing of the valve reduced 32 dB or less PVQ30 ON PVQ10 ON 30 dB or less 43 dB or less 50 dB or less OFF OFF Background noise: 20 to 25 dB Background noise: 20 to 25 dB Can be mounted on manifolds When continuously energizing adjacent valves at the same time, ambient temperature rises since the coil generates heat.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ2000-37A-2 For VZ22 AN120-M5 Noise reduction: 18 dB or more (8 x 17l ) AN110-01 Noise reduction: 21 dB or more (13 x 38l ) Description M5 R 1/8 (2) Silencer Note 1) For body ported type Note 2) For sub-plate mounted type 4-15-1 2 Series VZ200 How to Order Option M5 1 2 VZ2 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Series VZ200 Only body ported type Type of actuation

5 Port Solenoid Valve Series SQ1000/2000

of connection Applicable Base type stations P, R A, B Piping Port size C3 (for 3.2) C8 (for 8) C4 (for 4) Side SQ1000 C6 (for 6) J kit: Flat cable 1 to 8 stations SQ130 SQ131 420 20 Option SS5Q13Note 2) L3 (for 3.2) Built-in silencer Direct exhaust L4 (for 4) Top L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23

Compact Cylinder

L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

EX510

Internal Circuit (Brown) +24 V TD+ TD0 V q w e r DA DB DG SLD FG q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT FG DC-DC converter (insulated) +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D +24 V 0 V Power supply for the input and for the control unit of the Gateway +24 V RD+ RD0 V q w q w e r INPUT Flexible I/O Setting Examples The occupying

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

E-MY2_E_D

Options Controller mount bracket L type bracket MYE-LB Hexagon socket head screw M5 x 8 (2) DIN rail bracket MYE-DB Cross recessed panhead screw M3 x 6.5 (2) Clamp screw M4 x 10 (1) Bracket Cross recessed panhead screw Hexagon socket head screw Clamp screw Bracket L type bracket (MYE-LB) DIN rail bracket (MYE-DB) 5 Names and Functions of Individual Parts Controller integrated type General

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

MNB

B Z + Stroke DB DX DD 90 B 4-DT A DS DH 4-DR DL DU DO DO DC DE DU DA Rotating Angle Bore size (mm) Part no.