Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Modular F.R.L. Units

F G H SUP. 3 1 2 q Body size Description Symbol C D E 20 30 40 Key can be mounted when residual pressure is released.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

ZP

D. Applicable tube O. D.

Stability of suction position,

D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6 ZP3E-Y32UMlJB30 91.6 135.6 ZP3E-Y32UMlJB50 111.6 155.6 Model A B ZP3E-Y40UMlJB10 66.6 110.6 ZP3E-Y40UMlJB30 91.6 135.6 ZP3E-Y40UMlJB50 111.6 155.6 Model

New

type VXF24A<<< Grommet Grommet (with surge voltage suppressor) A B A B C D C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Combination example q Air combination AC20B-02E-D 1 pc. Spacer with bracket Y200T-D 1 pc. Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

7

Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98 (106) 104 (112) 168 (176)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Required fluid volume for extension (l/min) Required fluid volume for retraction (l/min) Bore size (cm) Piston rod diameter (cm) Piston speed (mm/s) Q: Q: D: d: : Q = D __ 4 6 _ 1000 .. Formula (1) Q = (D d) __ 4 6 _ 1000 .

JIS Standard Hydraulic Cylinder

D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 5.5 6 7 5.5 6.5 5.5 6 7 5.5 6.5 CHQ 4.5 4 4.5 4.5 4.5 4.5 4.5 4 4.5 4.5 4.5 4.5 CHK 4.5 5 5 6.5 6.5 4.5 5 5 6.5 6.5 CHN 8 12 9.5 11 10 8.5 13 10.5

NCQ8

Q J E D-rod Dia.

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Magnetically Coupled Rodless Cylinder

in Area C in the case of 15. 25, 32, 40, 50, 63 (mm) Auto switch model A B C D D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-Y5 D-Y7P D-Y7W D-A9 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 D-M9 D-F9W D-Z7 D-Z80 Bore size (mm) 25 32 40 50 63 18 21.5 23.5 27.5 29.5 99 108.5 124.5 148.5 158.5 43 46.5 48.5 52.5 54.5 74 83.5 99.5 123.5 133.5 23 26.5

Rotary Actuator

CDRB2BW40-=S/D CDRB2BW20/30-=S/D CDRB2BW10/15-=S/D A port B port q e t e !2 q o !2 !0 !0 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

ZP3

B C D E Y q Pad dia.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

ZP

C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y