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(mm) BF WC 20 24 32 42 52 VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZF 14 15 21 24 31 WD 1.5 1.5 1.5 2 2 ZE 5 8 10 14 17 BG VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 19 22 35 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 Model MHSHJ3-32DB MHSHJ3-40DB MHSHJ3-50DB MHSHJ3-63DB MHSHJ3-80DB 0 0.062

ZP

M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across flat 27 (Hexagon) 35 16 Width across flat 27 (Hexagon) 35 16 9 9 9 9 M18 x 1.5 Width across flat 21 (Hexagon) 4 x M5 x 10 (J) M18 x 1.5 Width across flat 21 (Hexagon) 4 x M4 x 8 (J) (J) Width across flat 21 (Hexagon) 70 I 45 I I H

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Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

LEC-OM02704CN

145 14.3.2 146 14.3.3 147 14.3.4 147 14.3.5 147 14.3.6 148 14.3.7 148 14.3.8 149 14.4 14-10 14.4.1 14-10 14.4.2 14-15 14.5 14-18 14.5.1 14-18 14.5.2 14-20 14.5.3 14-21 14.5.4 (DIO) 14-24 14.5.5 ON/OFF 14-29 14.5.6 (DIO) 14-31 14.5.7 1ON/OFF() 14-32 14.5.8 14-33 14.5.9 14-40 14.5.10 14-41 14.5.11 14-42 14.5.12 14-48 14.5.13 14-49 15 15115-112

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

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Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

Best Pneumatics Vol. 14

P . 14-2-39 14-2-34 35 Air Filter Series AF10 to 60 Flow Characteristics (Representative values) Precautions AF10 M5 AF40-06 Rc 3/4 0.10 0.10 Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

KJ

17 18.5 2 2.5 3.5 4.6 6 Applicable fitting 15-4-21 14 Series KQ2 Different Diameter Plug-in Y: KQ2X Applicable tubing O.D.

Series KV2 Fittings

21 21 22 22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

CL

14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L VXA H M H W E VN LQ1U1A LQ1U2A LQ1U2B LQ1U2C LQ1U3A LQ1U3B LQ1U4A LQ1U4B LQ1U5A LQ1U5B LQ1U6A LQ1U6B 10 11.5 29 10 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" LVC 16.5 14 41 14 15 25 1 LVA 17 17 20 54 23 Class 6 LVH 28 21 21 24 63 LVD 77 26 26 29 39 (E) shows the approximate dimension of the inserted tubing from the end of the nut.

CV/MVGQ

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no.

CV/MVGQ

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Dot marking White 10 Black Black 1 None White 11 Red Brown 2 None Yellow 12 Red Red 3 None Orange 13 Red Orange 4 None Yellow 14 Black Yellow 5 None Pink 15 Black Pink 6 None Blue 16 White Blue 7 None Purple 17 None Purple 8 White Gray 18 None Gray 9 Black Orange 19 Black White 10 Black Red 20 White White 11 Red Brown 21 White Yellow 12 Red Pink 22 Red Orange 13 Red Gray 23 Red Yellow 14

SV

63.5 60 52.5 12 (For DIN rail mounting) n1 = Valve stations n2 = Input block stations (7.5) B B B B 145.6 127.6 L2 = L110.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 198

VS 8-2/VS 8-4

12 60 1 1 39 4 4 4 4 30 21 1 1 33.5 24.5 34.5 17 13 C2 (M12) 27 (n-1) x 27 64.5 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port U side D side n Station number 4 2 1 3 L2 L1 (n-1) x 27 27 36.5 21 56 56 2 21 98 Indicator light Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 PWR