Piping: Body Ported, Stations: 12 Stations, A, B Port: NPTF, Bracket: -

Piping: Body Ported, Stations: 14 Stations, A, B Port: NPTF, Bracket: -

Piping: Body Ported, Stations: 16 Stations, A, B Port: NPTF, Bracket: -

Piping: Body Ported, Stations: 18 Stations, A, B Port: NPTF, Bracket: -

VNH

Electrical entry/With light/surge voltage suppressor Nil F N T Rc G NPT NPTF Valve type T TS TZ Conduit terminal Conduit terminal with surge voltage suppressor Conduit terminal with light/surge voltage suppressor 1 3 N.C./3.5 MPa N.C./7.0 MPa TL Conduit terminal with indicator light Rated voltage: Except 6, 7, 9.

Piping: 20 (Body Ported), Stations: 4 Stations

Piping: Body Ported, Stations: 4 Stations, A, B Port: -, Bracket: -

Piping: Common SUP/Common EXH, Stations: 4 Stations, Bracket: Bracket

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 04, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Stations: 04, Thread: 00T (NPTF)

Model: 5 (10-SY5000), Stations: 04, Thread: 00T (NPTF)

Stations: 04, Thread: 00T (NPTF)

Type: 21 (Common SUP/Individual EXH), Stations: 04, Bracket: None, Thread: 00T (NPTF)

2

Power cable outlet (17) (Electric wire diameter 9 to 11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 (mm) Dimensions 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 A B C D E F Model IDF22E-20 IDF37E-20 IDF22E-30 IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30,

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection T thread 10 20 30 40 50 04 8 4 10 13 16 A10 27.7 2.5 N S U F GN GS Vacuum inlet: Built-in One-touch fitting Pad diameter: 20 to 50 (Buffer stroke: 20 to 50 st) 06 10 6 J K ZP T F 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 20 25 32 40 50 A14 Applicable tubing O.D.

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Table of Contents

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.