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PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

Free Mount Cylinder

In-line In-line In-line Electrical entry direction Perpendicular Perpendicular Perpendicular 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution 5 to 40 mA Load current 40 mA or less 80 mA or less

3 Port Solenoid Valve Rubber Seal Series SY100 1

For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

3 Port Solenoid Valve Series SYJ300/500/700

x 0.5 Grommet P.1 + SYJ500 Body ported Base mounted 0.66 2R3 (ARR) M5 x 0.8 L plug connector P.15 SYJ700 + For DC For DC 2.5 2R3 (ARR) 1/8 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC With surge voltage suppressor With light/surge voltage suppressor M plug connector Nonlocking push type N.C.

Compact 5-Port Solenoid Valve

supply circuit breaker Specific Product Precautions 24 VDC Figure 2.

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

PF2A/PF2W

Local Area: (800) 258-9200-www.stevenengineering.com 3 x 7.2(= 21.6) Black 7 3 Load 8-M3 ZSP 36 +0.5 0 6.4 Brown 6 2 + Blue ISA2 5 1 12 to 24 VDC 1 2 3 4 IS Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white wire of the sensor to .

0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

) All voltages 24 VDC !

A

40mA D-K39 D-K39C 2 Wire 10~28 VDC 2V or less ON: Red LED; Green: Best Position 5~40mA D-G59W D-J59W 3 Wire NPN 28 VDC 4V or less ON: Red LED; Green: Best Position 40mA D-G5PW D-F5PW 3 Wire PNP 4V or less ON: Red LED; Green: Best Position 80mA D-G5BAL D-F5BAL 2 Wire 10~28 VDC 4V or less ON: Red LED; Green: Best Position 5~40mA D-G5NTL D-F5NTL 3 Wire NPN 28 VDC or less 2V or less ON: Red

7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC Note) For symbol, refer to page 741.

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

PSE550/300

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

ZX

to plug connector Y 24 VDC and 12 VDC are applicable to 0.45 W.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)