MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 1000 st 2 900 st 1.5 800 st 700 st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300

Electric Actuator

to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 The length of the encoder, motor and lock cables are the same.

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5

MGG

, 200 20 27 5.5 6 8 4 16 134 150 102 118 9 9 85 140 M8 35 149 16 170 50 93 95 134 50 75 25 75, 100, 125 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 149 16 170 50 93 95 134 50 75 32 150, 200, 250 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 182 19 194 55 103 115 152 56 90 40 300 38 7 11 12 7 21 190 210 140 160 11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ0 L VQ4 kit VQ5 VQZ VQD P. 2-4-146 P. 2-4-150 P. 2-4-154 Terminal block box L Enclosure IP65 compliant kit Enclosure IP65 compliant Enclosure IP65 compliant W type only P. 2-4-146 P. 2-4-150 P. 2-4-154 P. 2-4-158 C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block C kit P. 2-4-196 P. 2-4-200 P. 2-4-204 Terminal block 2-4-117 2-4-118 Cylinder Speed Chart Use as a guide for selection.

energy saving effect

Power cable entry (Hole 40) (Grommet with membrane) Note) A breaker handle is equipped as standard for the 400 V type only. 172 Thermo-chiller Inverter Type HRSH Series Dimensions HRSH100/150/200/250-W-20 (Water-cooled 200 V type) HRSH100/150/200/250-W-40 (Water-cooled 400 V type) HRS HRS 090 Eye bolt M12 (4 places) 715 HRS 100/150 687 Operation display panel Facility water outlet Rc1 HRSH

CG1

25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63 Pins and snap rings for double knuckle joint are included, not mounted.

Smooth Cylinder/Low Speed Cylinder

, 175, 200, 250, 300, 350, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed

Electric Actuators

200 200 200 Overhang: L1 [mm] Overhang: L1 [mm] Overhang: L1 [mm] Overhang: L1 [mm] 160 160 160 160 L1 120 120 120 120 80 80 80 80 40 40 40 40 0 0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Table of Contents

200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure to generate a flow rate of 500 l/min (ANR) is P1 0.14 MPa for a 6 orifice (VX2 4), and P1 0.3 MPa for a 4.5 orifice (VX23). 3 2 For Saturated Steam [663] (179)

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

CJ2

15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

JA/JAH/JB/JS

-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 8

JA/JAH/JB/JS

24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

Cylinder with Lock

25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 [mm] Bore size h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 73 86 98 111 136 161 186 211 236 40 81 94 106 119 144 169 194 219 244 269