VZ3000

14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

G3-G4 contact specifications Maximum voltage: 120 V AC/DC Maximum current: 0.5 A/4.8 V DC Maximum capacity: 2.4 VA 11 12 11.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang

MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

SX

A: Orange B: Green (Rail mounting hole pitch 12.5) (Station n) (Station 1) Block separation lever Light/Surge voltage suppressor (Push type) (DIN rail dimension) (mm) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 235.5 223 210.5 198 185.5 185.5 173 160.5 148 225 212.5 200 187.5 175 175 162.5 150 137.5 165 154.5 144 133.5 123 112.5 102 91.5 81 SS5X3-45SStations BC4 C6 16 15

CNA

55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 D-A59W n (Same side) CL 120 110 100 15 90 1 2 (Different sides, Same side), 1 CL1 D-F5W/J59W D-F5BAL D-F59F D-F5NTL 140 130 120 110 25 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 140 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 110 + 55 n = 4, 8, 12, 16 n (Same side

CNA

55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 D-A59W n (Same side) CL 120 110 100 15 90 1 2 (Different sides, Same side), 1 CL1 D-F5W/J59W D-F5BAL D-F59F D-F5NTL 140 130 120 110 25 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 140 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 110 + 55 n = 4, 8, 12, 16 n (Same side

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXSW20-200 120 178 60 10 130 20 198 70 Standard stroke Long stroke (-XB11) 2-5.7 140 218 30 80 44.5 44.5 150 238 90 40 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20-10 has a

LVQ

126 (H) V S 42 84 48 96 165 25 164 168 42 84 48 96 175 32 177 M N Model J L M N Q Y LVQH20Sm-1 LVQH30Sm-1 LVQH40Sm-1 LVQH50Sm-1 LVQH60S-Vm-1 V S 21.8 5 7 15 21 55 C V S 32 6 7 20 25 80 B A V S 37.5 6 7 20 25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

VZ100/300/500

4 85 72 2 53 40 3 69 56 VFN L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor 4-6-11 12 Courtesy of Steven Engineering,

Table of Contents

Functions . 159 160 162 162 163 163 164 165 166 166 168 168 168 168 169 169 169 170 170 170 171 172 175 175 175 175 176 177 178 178 178 178 179 179 179 180 180 180 181 182 187 187 187 187 188 188 188 189 190 192 193 197 197 198 198 198 198 199 199 199 200 201 203 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Table of Contents

MP 0.2 MPa 0.2 MPa 20 20 0 20 40 60 80 100 120 140 0 40 80 120 160 200 0 40 80 120 160 20 40 60 80 100 120 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-40D1 2 MHL2-32D1 2 MHL2-40D MHL2-32D Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 500 500 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 300 300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6

Air Cylinder

112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6 x 1 89 122 114 147 139 172 164 197 40 13 21 M8 x 1.25 113 150 138 175 163 200 188 225 213 250 Symbol * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of

IDU/IDF

A B C E 141 120 85 1/2 725 410 IDU6D IDF6D 165 445 165 141 915 IDU-BP6C IDF-BP6C 1/2 141 3/4 120 85 755 410 196 IDU8D IDF8D 445 196 141 1045 IDU-BP8C IDF-BP8C 3/4 152 3/4 1 131 91 815 405 IDU11C IDF11C 196 445 196 1155 152 IDU-BP11C IDF-BP11C 3/4 1 175 131 91 890 405 222 IDU15C IDF15C 445 222 175 1230 IDU-BP15C IDF-BP15C 1 1 183 91 70 970 405 IDU22C1 IDF22C1 222 445 222 1445 71 IDU-BP22C

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

Manifold Specifications

14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5

smcmaintenancepartslist

AL-7S AL-6S AL-8S AL-9S 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 A T N V 2 Fiber Elements Specifications Operating temperature (C) 20 to 100 Differential pressure resistance (Max.) Element replacement differential pressure Four types of materials with different characteristics are available so the filters are applicable to any application.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch