Table of Contents Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.
120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38
When you set a value more than "servo motor maximum speed 120%", the set value will be clamped. When you set "0", the value of "servo motor maximum speed 120%" will be set. Setting range: 0 to 20 [r/min]/ [mm/s] 5 46 5.
st 101 to 125 st 126 to 200 st Bore size (mm) 20 25 32 40 ZZ ZZ ZZ ZZ LS 70 70 70 76 LS 95 95 95 101 LS 120 120 120 126 160 185 145 145 151 135 165.5 190.5 215.5 140.5 167.5 192.5 217.5 142.5 185 210 235 160 Other dimensions are the same as basic style.
LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.
, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.
Table Weight [kg] Stroke [mm] Model 30 50 75 100 125 150 LES8 LES16 LES25 0.06 0.08 0.10 0.10 0.13 0.18 0.20 0.25 0.30 0.36 0.50 0.55 0.59 If the mounting position is vertical upward, add the table weight. LES25/Step Motor 200 180 160 140 120 100 80 60 40 20 0 70 50 30 Lead 8: LES25K Force (N) Lead 16: LES25J Set value of pushing force [%] Step 2 Check the set value of pushing force.
50, 63) 25, 32, 40, 50, 63 -X REA Individual -X CXS 10 to 100 110, 120, 125, 150 15 (5), 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 CQ2AH 10 to 100 110, 120, 125, 150, 175, 200 20, 25, 32 1405 Actuators Precautions 1 Be sure to read this before handling.
200 300 39 77 117 167 28 3 3.5 M6 x 1.0 12 17 25 37.5 13.5 30 26 78 38 91 64 82 50 44 120 200 300 39 77 117 167 34 4 4.5 M6 x 1.0 12 17 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing) MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 25 to 100 st 125 to 200 st 250 st or more 25 to 100 st 125 to 200 st 250 st or more
voltage suppressor Grommet Grommet terminal (E) (Standard) Non-locking push type (Flush) 100 VAC, 50/60 Hz VFS1000 (P .1114) 1.8 1.8 SV Grommet terminal (EZ) Conduit terminal (TZ) DIN terminal (DZ) 200 VAC, 50/60 Hz 24 VDC Body Ported 2 position double SYJ Non-locking push type (Extended) With surge voltage suppressor 3 position closed center (Option) VFS2000 (P .1122) SZ 3.4 3.4 110 to 120
Only surge voltage suppressor can be equipped on the middle of lead wire. 110 to 120 VAC, 50/60 Hz Locking type (Tool required) VFS 3 position exhaust center 220 VAC, 50/60 Hz 240 VAC, 50/60 Hz 12 VDC 100 VDC VS4 Locking type VFS3000 3 position pressure center 6.8 6.5 (Lever) VQ7 Locking type (lever) is not available for body ported Series VFS2000/3000.
Dust-protected SI unit: L5 = 10.5n + 97, L6 = L3 + 25, L7 = L4 + 25 Formula L1 = 10.5n + 44.5, L2 = 10.5n + 72.5 n: Station (Maximum 16 stations) 2 L n Dimensions 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 93.5 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5
Scale: 35% For 45PG (20 pins) For 45PH (10 pins) 2 123 112.5 91.5 15.5 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 210.5 200 175.5 17.5 198 187.5 165 16.5 185.5 175 154.5 15.5 173 162.5 144 14.5 160.5 150 133.5 13.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45PUStations B-Q (26 pins) C4 C6 Stations n L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 148 137.5 118.5 14.5
Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type 40, 50, 63, 80, 100, 125 .
125 126 127 128 129 130 135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196
to 125st 126 to 200st Bore (mm) 20 25 32 40 ZZ 135 ZZ ZZ 160 ZZ 185 LS 70 70 70 76 LS 95 95 95 101 LS 120 120 120 126 145 145 151 140.5 165.5 190.5 215.5 142.5 160 167.5 185 192.5 210 217.5 235 1-7-24 Standard: Single Acting Spring Return/Extend Series CG1 With Mounting Bracket Front flange/CG1FN (mm) Bore size (mm) Stroke range (mm) B E F FX FD FT 20 25 32 40 Up to 125 6 5.5 28 2 12 40
M5 x 0.8 56 10 38 5 44 110 27 60 105 200 28 70 30 3 81 3.5 54 M6 x 1.0 72 12 44 17 44 120 300 39 77 117 167 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 200 34 78 38 4 91 4.5 64 M6 x 1.0 82 12 50 17 44 120 300 39 77 117 167 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 50 st 25 st 75 to 100 st 75 to 100 st 125 to 200 st 250 st or more 125 to 200 st
4) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 135 + 55 140 + 55 120 + 55 150 + 55 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 +
16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50