ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325

CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

smcmaintenancepartslist

100 200 300 400 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Guide Cylinder Series MGG

C D 4 x O T Q 2 x P (Rc, NPT, G) S W K L E B U AA A R AP I X AB Y + Stroke J V Z + Stroke MGJ AC AD 8 x AF MGP MGQ AE MGG MGC 100 piston rod end connection MGF MGZ MGT (mm) Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AC AD AE AF AP B C D E F G H I J K L M N 75, 100 125, 150 200, 250 300 200 25 25 15 170 50 60 228 30 140 200 13.5 65 117 135 180 66 100 M12 x 1.75 depth 24 M16 x 2 depth

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Air Cylinder Series CS1

CS1W Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1W L 125 100 CDS1W With auto switch L 125 M9BW 100 Built in magnet (125 to 200) Number of auto swithes 2 pcs. 3 pcs. 1 pc. n pcs.

NCM

V Reed switch Grommet 100 V or less IC circuit 100 V, 200 V 12 V Relay, PLC 200 V or less 2-wire 24 V Connector 24 V or less Grommet Diagnostic indication (2-color indication) Solid state switches marked with are produced upon receipt of order.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions: Desired number of pads 5 pcs.

SYJ300/500/700

Caution Without indicator light SY100-61-1 With indicator light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no.

CM2

, 125, 150 CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size Sub-plate, 40, 41, 42, 43 manifold Nil: Without sub-plate D: Push-turn locking slotted type (With gasket and screws) 01: 1/8 with sub-plate Electrical entry 24, 12 VDC, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC, 100, 110, 200, 220 VAC Grommet L plug connector M plug connector DIN terminal E: Push-turn locking lever type M8 connector MN: Without lead wire

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Electric Actuators

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball screw drive Ball screw drive Belt drive Series LEFS Series LEFB Series LEFS Stroke 300 to 1000 300 to 2000 300 to 2000 Size 16 25 32 Stroke 100 to 400 100 to 600 100 to 800 200 to 1000 Size 16 25 32 40 Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Guide Rod Slider Step Motor

LG1H

LG1H21PA-100-F LG1H21PA-200-F LG1H21PA-300-F LG1H21PA-400-F 100 200 300 400 60 80 160 260 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)