Integrated Controller

200 250 300 350 400 450 30 3000 mm/s2 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 5000 mm/s2 10 10 mm/s2 5 0 50 100 150 200 250 300 350 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY32HC Horizontal/Lead 4 Vertical/Lead 4 180 160 140 120 100 80 60 40 20 0 50 100 150 200 50 45 40 35 30 25 20 15 10 5 0 50 100 150 200 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 5000 mm

5-Port Solenoid Valve

The drawing above shows when P, E port entry is D. n: Stations 2 3 4 5 6 7 8 9 10 11 12 L1 71.5 82 92.5 103 113.5 124 134.5 145 155.5 166 176.5 L2 63.5 74 84.5 95 105.5 116 126.5 137 147.5 158 168.5 L3 98 110.5 123 135.5 148 160.5 160.5 173 185.5 198 210.5 L4 87.5 100 112.5 125 137.5 150 150 162.5 175 187.5 200 L5 13.5 14.5 15.5 16.5 17.5 18.5 13 14 15 16 17 263 Plug-in Metal Base SY3000/

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

MPa Valve specifications Electricity specifications 2 position 3 position Min. operating pressure Ambient and fluid temperature Proof pressure 1.5 MPa 10 to 60C (1) Lubrication Pilot valve manual override Shock/Vibration resistance Enclosure Coil rated voltage Allowable voltage fluctuation Coil insulation type Apparent power (Power consumption) Non-lube (2) Non-locking push type (Flush) 150

Programless controller Step motor (servo 24 VDC)

2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

JXCx-OMU0004

2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

Hygienic Design Cylinder Series HY

165 190 115 120 125 130 135 140 145 150 155 180 205 115 120 125 130 135 140 145 150 155 180 205 HY C M 10 13.5 9 9 13 D9.5 -X Individual -X Technical data 889 Series HY Specific Product Precautions 1 Be sure to read before handling.

5 Port Solenoid Valve Series VQZ1000/2000/3000

19 19.5 19 18 18.5 18.5 17.5 17.5 17.5 17.5 17.5 176 188 200 164 128 140 152 116 80 92 104 80 80 80 80 Note) The L dimension of 2 to 6 stations is the same.

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

Guide Cylinder/Compact Type Series MGC

AI RLQ AM W Cutout window MLU View A-A' MLGP Mounting dimensions Standard Stroke ML1C (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B BP Note 3) BZ GC GD GK Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 134 150 92 108 9 9 75 140 M8 32 135 1/8 73.5 28 54 3.5 104 16 16 160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 29 62 4 75, 100, 125 150, 200, 250 300 104 16 16

Air Cylinder Series MB

2 (different side or same side) 1 150 120 130 D-P5DWL 140 + 65 n = 4,8,12,16...

C76

151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5

C76

151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 1000 (1001 to 1400) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 204 (215) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000 (1001 to 1500) 133 (140) 18 (29) 150 (180)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch

MTS

(kg) 40 32 32 1 1 25 20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80

Series VQ Base Mounted Metal Seal/Rubber Seal

Dimensions (mm) Equation L1=10.5n+45.5, L2=10.5n+63 n: Station (Max. 16) L n 2 66.5 84 112.5 123 3 77 94.5 125 135.5 4 87.5 105 125 135.5 5 98 115.5 137.5 148 6 108.5 126 150 160.5 7 119 136.5 162.5 173 8 129.5 147 175 185.5 9 140 157.5 187.5 198 10 150.5 168 187.5 198 11 161 178.5 200 210.5 12 171.5 189 212.5 223 13 182 199.5 225 235.5 14 192.5 210 237.5 248 15 203 220.5 250 260.5 16 213.5

Refrigerated Air Dryers Series IDF/IDU

Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.