Table of Contents

IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170 Long 1,000 870 5 0.37 to 1.24 150 300 Long 1,500 1,300 6 0.40 to 1.32 230 460 110 100 1 Short 1.00 to 3.05 18 36 160 140 1 1/4 Short 0.90 to 2.67 27 54 270 230 1 1/2 Short 1.10 to 3.29 45 90 270 230 2 Middle 0.68 to 2.05 45 90 Component Parts IF33-10 500 420 2 1/

Air Slide Table Series MXS

45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55 35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 ZZ 108 108 108 118 131 172 213 271 311 MXS25L-10 MXS25L-20 MXS25L

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

MXS

Model F 50 50 50 60 35 60 70 75 80 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60

Metal Seal/Rubber Seal Series VQ Body Ported

65 125 135.5 16 15 192 212 275 285.5 14 181.5 201.5 262.5 273 13 171 191 250 260.5 12 160.5 180.5 237.5 248 11 150 170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS

Dual Rod Cylinder Series CXSJ/CXS

25 5 10 30 8 48 10 10 38.5 CXW Dimensions by Stroke CXT Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129

Table of Contents

(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFN DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C6 VV5Z3 G L M D G L M D VZ34Stations 4(A), 2(B) port size VZ3502 2 stations Applicable blanking plate assembly VZ3000-69-2A 20 One-touch fitting for 4 One-touch fitting for 6 20 stations C4 SUP/EXH block mounting position C6 DIN rail length specified B D U Both sides:

Electric Actuator

Note 2) For interface use, supply 24 VDC o10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

Guide Cylinder Series MGG

35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x

Air Cylinder Series CS1

182 144 106 206 118 197 Up to 1400 1401 to 1600 18.5 M16 x 1.5 M36 x 1.5 63 60 45 70 48 17 20 41 24 10 39 45 204 162 115 125 231 132 227 Up to 1800 1801 to 2000 18.5 M18 x 1.5 M40 x 1.5 63 60 50 74 48 17 20 46 24 10 39 45 226 182 231 150 115 132 245 Up to 1800 Lube Non-lube 1801 to 2000 18.5 M20 x 1.5 M45 x 1.5 1 71 67 60 86 60 20 23 25 56 29 12 49 55 277 225 140 160 301 180 M56 x 2 Up to

MXS Series Air Slide Table

45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

CA2

(n 4) 2 105 + 45 (n 4) 2 n = 4, 8, 12, 16 20 + 45 (n 2) 2 n = 2, 4, 6, 8 95 + 45 (n 4) 2 n = 4, 8, 12, 16 100 + 45 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (Different sides and same side) With 1 15 120 130 140 D-P5DWL n 140 + 65 (n 4) 2 n = 4, 8, 12, 16 15 + 65 (n 2) 2 n = 2, 4, 6, 8 120 + 65 (n 4) 2 n = 4, 8, 12, 16 130 + 65 (n 4) 2 n = 4, 8, 12, 16 6-8-14 15 Series CA2 Proper

Floating Joint

G H Weight (kg) Nominal size Pitch 180 JAF180-40-150-X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

Clamp Cylinder Series CK1

CKG40-R100 Series CKP150/63 Applicable auto switch Auto switch mounting bracket part no. 63 50 40 Applicable cylinder series CKG40-R125 BK1T-040 D-P4DWSC D-P4DWSE D-P4DWL/Z Common Series CKG1 CKG140-150 CKG150-150/CKP150-150 CKG163-150/CKP163-150 CKG40-R150 Series CKP1 BAP1T-040 D-P79WSE D-P74L/Z 1338 Series CK1 Specific Product Precautions 3 Be sure to read before handling.