301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125
301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125
(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 120 L/min) value is below 240 L/min) value is below 480 L/min) 150 to 3150 L/min 300 to 6300 L/min 600 to 12600 L/min 5.0 0 to 5%F.S.
= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.
700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.
cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.
Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7
50 mm 50, 63 63 mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1)
Over 100 st 200 st or less Over 200 st 300 st or less Over 300 st 32 6.5 16 35.5 30 96 44 110 78 98 63 24 48 124 200 300 33 45 83 121 171 42 4 4.5 3 6 M8 x 1.25 16 21 40 13 18 39.5 30 104 44 118 86 106 72 24 48 124 200 300 34 46 84 122 172 50 4 4.5 3 6 M8 x 1.25 16 22 50 9 21.5 47 40 130 60 146 110 130 92 24 48 124 200 300 36 48 86 124 174 66 5 6 4 8 M10 x 1.5 20 24 63 13 28 58 50 130 70
Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 SJ SY 800 700 600 500 400 300
300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38 42 35 50 to 124st 45 46 48 50 54 47 125
Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.
180 300 140 240 200 320 140 220 200 320 Model MY1HT/M1 MY1HT/M2 MY1HT/M3 Select the moment from within the range of operating limits shown in the graphs.
O.D.: 4 6 8 (A, B port) 300 (Lead wire length) Polarity indicator (Press and turn for the locking type.)
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light
When exceeding 300 stroke, the allowable maximum stroke length is determined by the stroke selection table.
IDF190D 38000 190 4B flange 6B flange 43000 IDF240D 50 240 35C R22 54000 IDF370B 65000 370 With motor operated auto drain.
Electrical option Piping option Port thread Special voltage Electrical entry/Electrical option Symbol Port thread Specifications Symbol Electrical entry 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC
C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light