Table of Contents

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 50 100 20 30 40 50 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

72 89 110 5 5.5 5.5 6 7 7 10 10 6 8 10 14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 20 25 32 40 50 63 80 100 201 to 350 301 to 400 301 to 450 301 to 800 301 to 1200 301 to 1200 301 to 1400 301 to 1500 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 M12 x 1.75 depth 22 For mounting brackets, refer to

1

(70) 4.5 19.5 (36) (29.5) 300 519.5 293 5 to 50 ZZ + Stroke (A + B) 25 56.5 29 (76.5) 5 22.5 (39) (32.5) CP95 Note 1) ( ): Denotes the dimensions with auto switch.

JXCx-OMU0004

1800 15 80 2000 100 2000 100 2000 100 2000 LEHS LEHS10 LEHS20 LEHS32 LEHS40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700 40 700 8 35 800 45 800

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

For sub-plate type, type 41, S41, 42, S42 manifold (With gasket and screws) Body option Electrical entry M: Main/Pilot valve common exhaust type 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Manual override Grommet L plug connector M plug connector M8 connector G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead

CL

5 !6 !

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

CV/MVGQ

18 15.5 13 26 30 8 13 5 8 65.3 20 0 0.033 60 75 45 Up to 300 22 19.5 40 17 32 37 10 13 7 4 6 8 70.5 26 0 0.033 45 19.5 40 13 7 4 60 75 Up to 300 22 17 32 37 12 6 8 76.5 26 0 0.033 5 66 36 82 50 24 21 52 14 16 7 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 ZZ QY S Z MM N NA NN Q I K Bore size (mm) 20 25 32 40 37 116 24 M20 x 1.5 19.8 14 62 5 M8 x 1.25 15 28 22 14 62 41 120 15 30 M26 x 1.5

CV/MVGQ

13 26 30 5 8 20 0 0.033 45 75 60 4 40 7 19.5 13 22 10 70.5 Up to 300 17 32 37 6 8 26 0 0.033 45 75 60 4 40 7 19.5 13 22 12 76.5 Up to 300 17 32 37 6 8 26 0 0.033 50 82 36 66 5 52 7 21 16 24 14 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 116 37 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 41 62 14 22 M26 x 1.5 30 15 M10 x 1.25 5.5 33.5

Table of Contents

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CM2

SCM220A, #12, #5, #19 CM2G25SCM225A, #12 SCM225A, #12, #5 SCM225A, #12, #5, #19 CM2G32SCM232A, #12 SCM232A, #12, #5 SCM232A, #12, #5, #19 CM2G40SCM240A, #12 SCM240A, #12, #5 SCM240A, #12, #5, #19 Spring extend CM2G20SCM220A, #11 SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A

VZ100/300/500

wire (Length 300 mm) M: With lead wire (Length 300 mm) G: Lead wire length 300 mm 9 Other Option LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm LN, MN type: With 2 sockets. 4-6-5 6 Series VZ100 Specifications Low power consumption: 1.8 W DC Air Fluid Operating pressure range Refer to the table below.

CL

57.5 8 25 26 90 19.5 13 83.5 75 60 4 7 45 17 32 10 40 37 22 Up to 300 69 8 32 26 90 19.5 13 83.5 75 60 4 7 45 17 32 12 40 37 22 Up to 300 69 8 40 32 100.5 21 16 90.5 36 82 66 5 7 52 22 41 14 52 47.3 24 Up to 300 76 11 N NA Bore size (mm) MM NN H H1 H2 K P PG PH PL PW S ZZ Z GC GD GK GL GQ GR 1/8 1/8 1/8 1/4 20 19.5 M20 x 1.5 M8x 1.25 24 172 15 181 5 127 8 4 38 6 4 20 3.5 5 8 22 55 41 25

Environment

Nil Without cable 2 2 5 5 A 10 !

CY1

CY1B20 200 1000 H type Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 H type 400 50 L type 300 200 L type 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Distance from cylinder shaft center Lo (cm) CY1B25 500 Allowable driving force Fn (N) 300

Slider Type Ball Screw Drive/11-LEFS Series

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000

3 Port Air Operated Valve Series SYJA300

n) VT 48.5 [55.5] 20 A A 5 VP (Pitch) P=10.5 15.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" 20 5 A A VG (Pitch) P=10.5 15.5 M5 x 0.8 (A port) VP L plug connector (L) M plug connector (M) M8 connector (WO) S070 Approx. 300 (Lead wire length) VQ 48.5 [55.5] 33.1 53 VKF 35.5 59.6 [66.6] Approx. 300 (Lead wire length) VQZ 62.8 [65] 53 [55.2] 61.9 54.5 VZ 48 VS Refer to page