CNA

, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

MG

32.5 89 WA WB Bore size (mm) Standard stroke (mm) Q R S T U VA VB X YY YL Z 50, 75 st 100 to 175 st 200 to 250 st 300 to 400 st 50, 75 st 100 to 175 st 200 to 250 st 300 to 400 st 80 100 140 180 156 198 75 52 174 52 128 200 300 54 92 128 178 100 M12 x 1.75 24 28 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 166 210 188 236 90 64 210 72 148 220 320 47 85 121 171 124 M14 x 2.0 28 11

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

External Grip Internal Grip MHS2-32D MHS2-32D 150 150 Pressure 0.6 MPa Pressure 0.6 MPa 120 120 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 90 90 0.3 MPa 0.3 MPa 60 60 0.2 MPa 0.2 MPa F 30 30 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L (mm) Gripping point L (mm) MHS2-40D MHS2-40D 250 250 Pressure 0.6 MPa Pressure 0.6 MPa 200 200 Gripping

IZx-OMT0049

250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 0.5s 100 0.5s 100 1s 1s 150 150 2s 2s 200 200 5s 5s 250 250 300 300 For IZT40

Electric Actuators

Rotation angle() 310, 180, 90 Size Size 6 10 10 30 50 10 30 50 25, 50, 75 25, 50 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-92 Gripper Step Motor (Servo/24 VDC) With dust cover Z type (2 fingers) Series LEHZJ F type (2 fingers) Series LEHF S type (3 fingers) Series LEHZ Series LEHS Opening/closing stroke 4 6 10 14 22 30 Opening/closing Opening/closing Opening/closing Size Size Size

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Cylinder with Lock

1 10 90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

CM2

115 140 165 32 18.2 36 32 72 185 25 37.5 50 75 100 125 85 97 110 135 160 12.5 52 65 77 90 115 140 165 40 20.2 46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

8, ) Note 1) 1 10 90 100 110 2 Different surfaces 20 90 100 110 Same surface 75 Different surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n

Guide Cylinder Series MGG

35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note) Since the electrical entry is LO, select a connector assembly part no. from those stated on page 90.

LEY-OM007

50.00 40 40 20.00 50mm 40mm 60 40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT Contoroller Help/Easy 1.3. 1 -6- (2) JOG SET MENU TEST DATA MONITOR JOG SET JOG JOG ALARM

Slider Type Ball Screw Drive/11-LEFS Series

LEY A (Table traveling distance) Note 2) 86 (165) (86) 90 13 88 [(90)] (3.1) Stroke (90) [88] 61 LES [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 65 48.5 20 LEPY LEPS (68) 8 20 31 Motor cable (2 x 5) LER 68 53.8 12.9 8 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock LEY -X5 Cable length 250 (214) 65 15 11LEFS 11LEFS 20 20 11LEJS Lock cable (3.3) 20 Motor