SX

(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

MB1

190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

Combination Cylinder

40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 12 12 15 18 18 14 20 20 9.0 9.0 80 90 105 130 150 190 212 236 MXP 11.5 MG 13.5 13.5 19 19 19 MGP 112.5 121 133 141.5 150 167 18.5 18.5 18.5 MGQ W/o rod boot

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 3.8 2.6 1.3 0.3 0.1 3.8 2.6 1.3 0.3 0.1 80 80 1.9 1.3 0.7 0.2 0.4 1.9 1.3 0.7 0.2

Square Tube Type Air Cylinder Series MB1

135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700

Basic type / Direct mount type Series CY3B/CY3R

250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

35 13 16 9 130 9 30 109 75, 100 125, 150 200, 250 300 32 M6 x 1 depth 13 60 118 35 102 106 150 M8 80 134 140 73 16 85 40 16 9 135 129 9 35 40 M8 x 1.25 depth 16 75 50 150 134 134 M8 95 186 170 175 93 105 50 19 19 12 170 9 45 152 50 M10 x 1.5 depth 21 90 56 160 152 140 115 210 200 103 190 115 55 21 12 194 25 11 50 182 M10 Long Stroke Bracket Mounting Stroke Bracket mounting stroke Stroke

energy saving effect

Power cable entry (Hole 40) (Grommet with membrane) Note) A breaker handle is equipped as standard for the 400 V type only. 172 Thermo-chiller Inverter Type HRSH Series Dimensions HRSH100/150/200/250-W-20 (Water-cooled 200 V type) HRSH100/150/200/250-W-40 (Water-cooled 400 V type) HRS HRS 090 Eye bolt M12 (4 places) 715 HRS 100/150 687 Operation display panel Facility water outlet Rc1 HRSH

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

to 1000 32 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100

MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

Programless controller Step motor (servo 24 VDC)

LEHF10 LEHF20 LEHF32 LEHF40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700

MY1

Model M M m m 10 16 20 25 32 40 50 63 80 100 0.8 0.1 0.3 5.0 1.0 0.5 2.5 0.3 0.8 15 3.0 1.7 5.0 0.6 1.5 21 4.2 3.0 10 1.2 3.0 29 5.8 5.4 20 2.4 6.0 40 8.0 8.8 MY1B 40 4.8 12 53 10.6 14 Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm 78 9.3 23 70 14 20 160 19 48 83 16.6 29 315 37 95 120 24 42 615 73 184 150 30 60 The above values are the maximum allowable values for moment and load

JXCx-OMU0004

5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700 40 700 8 45 800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70

Industrial Filters

20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150

CXS

, 50 CXSW 6 CXSW10 CXSW15 CXSW20 CXSW25 CXSW32 10, 20, 30, 40, 50 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 Refer to "Made to Order" on page 51 for long strokes (i.e., strokes beyond the standard stroke range).

Mounting: F (Front Flange), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 160mm

Mounting: F (Front Flange), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 100mm, First Stroke: 50mm

Mounting: F (Front Flange), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 125mm, First Stroke: 60mm