5

, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250

Hydraulic

250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 98 Series CHA Dimensions Front trunnion type: CHAU Z 2-Rc P Cushion adjustment screw 4-J Air release GB GB TT V T Width across flats G MM R (max.)

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

CV/MVGQ

15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

CV/MVGQ

13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26 0 0.033 0 0.039 42.5 50 21.5 16 M14 x 1.5 14 39 30 7 21 15 46.5 24 10 84.5 Up to 300 22 8 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

Rotary Cylinder Series MRQ

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Rotating angle Linear motion stroke (mm) 5 10 15 20 25 30 40 50 75 100 80 to 100 32 1.02 Nm 170 to 190 80 to 100 40 1.91 Nm 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

Table of Contents

300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3

CM2

301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 125 135 148 160 173 198 223 248 145 158 170 183 208 233 258 25 12.5 25 37.5 50 75 100 125 139 152 164 177 202 227 252 149 162 174 187 212 237 262 32 12.5 25 37.5 50 75 100 125 141 154 166 179 204

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

R 200/230VAC (50/60Hz) 2 Y 0 Without motor Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 7.2 200 8.4 300 9.6 400 10.7 600 13.2 500 12.1 mm kg C kg mm/s mm Standard stroke Stokes other than the standard strokes on the left are available by special order. Consult P/A.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Table of Contents

(Length 300 mm) Without lead wires Without connector Misc.

Table of Contents

Functions . 159 160 162 162 163 163 164 165 166 166 168 168 168 168 169 169 169 170 170 170 171 172 175 175 175 175 176 177 178 178 178 178 179 179 179 180 180 180 181 182 187 187 187 187 188 188 188 189 190 192 193 197 197 198 198 198 198 199 199 199 200 201 203 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Series VQ Base Mounted Metal Seal/Rubber Seal

0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa

CG1

O ring 4.5 X 2.5 X 1 O ring 6.4 X 5.2 X 0.6 O ring 5.5 X 3.5 X 1 O ring 7.4 X 5.8 X 0.8 O ring 6.5 X 4.5 X 1 O ring 11.4 X 9.4 X 1 Valve seal Gasket for valve retainer NBR NBR @7 @8 1.6-7 Series CG1 Basic/CG1BN: With Rubber Bumper (mm) Bore (mm) Standard stroke (mm) Long stroke (mm) TB ZZ GB GA F I MM E C AL H1 KA S D B1 NA A H J K P TA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

AC Servo Motor Driver (CC-Link Type ）

CR-50500 Okaya Electric Industries) Dimensions [Unit: mm] Rated C R voltage [ 30%] Test voltage [F 20%] Band (clear) AWG 18 Twisted wire (18.5 + 2) 1 AC [V] 15 1 Soldered Between terminals: 3.6 250 0.5 50 625 V AC, 50/60 Hz 60 s CR-50500 6 1 6 1 (1/2 W) Between terminal and case: 300 min. 300 min. 48 1.5 16 1 2000 V AC, 50/60 Hz 60 s (18.5 + 5) max.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

7

Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !