TABLE OF CONTENTS

Max Operating Pressure Differential Table A 3.5 Watts Orifice Size CV Factor FLOW CONFIGURATION Valve No: MODEL TYPE AC DC Inlet Exhaust Inlet Exhaust Model 581 2 Way Normally Open 581A15PE 581F15PE 581M15PE 581W15PE 300 275 230 150 300 275 230 150 .6MM .8MM 1.0MM 1.2MM 0.010 0.020 0.030 0.034 Model 582 2 Way Normally Closed 582A15DE 582F15DE 582M15DE 582W15DE 300 250 150 135 300 250 150

CATALOG VC10

Max Operating Pressure Differential Table A 3.5 Watts Orifice Size CV Factor FLOW CONFIGURATION Valve No: MODEL TYPE AC DC Inlet Exhaust Inlet Exhaust Model 581 2 Way Normally Open 581A15PE 581F15PE 581M15PE 581W15PE 300 275 230 150 300 275 230 150 .6MM .8MM 1.0MM 1.2MM 0.010 0.020 0.030 0.034 Model 582 2 Way Normally Closed 582A15DE 582F15DE 582M15DE 582W15DE 300 250 150 135 300 250 150

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

17

st Over 200 st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less 25 st or less Over 300 st Over 200 st 300 st or less Over 100 st 200 st or less Over 25 st 100 st or less 32 40 50 63 30 30 40 50 300 300 300 300 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 35.5 39.5 47 58 33 34 36 38 16 18 21.5 28 45 46 48 50 6.5 13 9 13 83 84 86 88 96 104 130 130 121 122 124 124 44 44 60 70

MLGP

5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 M6 x 1.0

MLGP

5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 M6 x 1.0

Table of Contents

300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3

MLGP

300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

MLGP

300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

Base Mounted Metal Seal/Rubber Seal Series VQ

Lead wire length Socket (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Note)AXT661-31A-, for 100/110 VAC. AXT661-34A-, for 200/220 VAC.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

HRX-OM-Q026

HRSH250/300-A HRSH250/300-A Sets threshold detection pressure Series, Other Series, Other for Circulating fluid discharge HRSH100/150/200/250models HRSH100/150/200/250models pressure rise alarm generation.

ISO Cylinder

301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Dimensions (mm) Equation L1=16n+53, L2=16n+87 n: Station (Max. 16 stations) L n 2 85 119 150 160.5 3 101 135 162.5 173 4 117 151 175 185.5 5 133 167 187.5 198 6 149 183 212.5 223 7 165 199 225 235.5 8 181 215 237.5 248 9 197 231 262.5 273 10 213 247 275 285.5 11 229 263 287.5 298 12 245 279 300 310.5 13 261 295 325 335.5 14 277

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

HRX-OM-X037

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .