MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25, 50, 75, 100, 125, 150, 200 CP95 Single knuckle joint Option Double knuckle joint 25, 50, 75, 100, 125, 150, NCM 40, 50, 63 (With pin) 200, 250, 300 Pin and snap ring are shipped together with double knuckle joint.

Proposals for Energy Saving

2.0 13 23 46 78 13 23 46 78 95 150 185 8 20 34 70 8 20 34 70 75 110 135 6/Rc 1/8 6/Rc 1/8 Box type (with built-in silencer) ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 88 48 8/Rc 1/8 10/Rc 1/4 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 Body ported type (without silencer) 88 48 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 6/Rc 1/8 10/Rc 1/4 8/Rc 1/8 10/Rc 1/4 Body

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

MY1

Mass m Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn

MG

150 st 150 st or less Over 150 st 150 st or less Over 150 st 150 st or less Over 150 st 80 80 80 45.5 40.5 24 38.5 0 146.5 193 30 46.5 25 160 193 13.5 46.5 100 100 100 49 43.5 26.5 41 166 203 36 0 37 30 180 203 14 37 8-19-48 Compact Guide Cylinder Heavy Duty Guide Rod Type Series MGPS 50, 80 How to Order MX MGP 50 50 S Y7BW MTS MY CY Number of auto switches 2 pcs. 1 pc.

Air Cylinder Series CS1

4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

Environment

5 to 20 60% to 95% 21 to 50 60% to 85% 21 to 50 80% to 95% 800 LEC SS-T Lead 4: LEY32C 700 Lead 8: LEY32B LEY25 1 to 4 20% to 65% LEY25A 1 to 4 40% to 95% 5 to 20 35% to 65% 5 to 20 60% to 95% 21 to 35 50% to 65% 21 to 35 80% to 95% 600 LEC Y Lead 16: LEY32A Force [N] 500 400 Motorless LEY32 1 to 4 20% to 85% 5 to 20 35% to 85% 21 to 30 60% to 85% * The pushing force in the table shows the

AC Servo Motor Driver

[ms] 95[ms] (Pin 23) ON Base circuit OFF 1) ON Ready (RD) Operation enabled Operation enabled OFF Note.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NPT finish piping port 150 + 100 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 n Double clevis pin and double knuckle pin made of stainless steel -XC27 150 + 30 (n 2) n = 2, 4, 6, 8 Same side 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 1 15 35 55 110 110 110 150 150 150 -XC30 Front trunnion Different sides Same side 2 -XC35 With coil scraper 150

Electric Actuator

Note 2) For interface use, supply 24 VDC o10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

MNB

300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700

LVQ

(mm) Dimensions H A B C D M N S T U V Model Vm Sm LVQ20m-3 LVQ30m-3 LVQ40m-3 LVQ50m-3 LVQ60-Vm-3 V S 64 77 25.5 46 31.5 58 7 15 83 34.3 10.6 7 V S 83 95 25.5 51 31.5 63 7 15 113.5 36.9 16.5 10 V S 95 109 25.5 51 31.5 63 7 15 119 37.9 22 10 V S 130 141 38 76 44 88 7 20 171.5 64 25 17 150 38 76 44 88 7 20 182.5 66 32 17 LVQ60 available only as V.

Environment

value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35% to 85% 300 21 to 30 60% to 85% 200 For vertical