Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

VQZ1000/2000/3000

130 (3 position) (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 (For 02) 65 58 (12) 56 (26) 16.5 5 R1 P 1 R2 3 11.5 21 21 PE port 2-Rc 1/4 1(P) port (30) 4-Rc 1/4 3(R2), 5(R1) port 60 L plug connector (L) DIN terminal (Y) 157 (3 position) 300 144 (Double) (Lead wire length) 108.5 (Single) 72 163.5 (3 Position) MAX.10 Indicator light 150 (Double) 111.5 (Single) 75 Pg.7 57 <

Cylinder with Lock Series CLS

MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400

Programless controller Step motor (servo 24 VDC)

1200 90 1200 10 250 1400 150 1400 100 1400 11 300 1600 180 1600 110 1600 12 350 1800 210 1800 120 1800 13 400 2000 240 2000 130 2000 14 450 2500 270 2500 140 2500 15 500 3000 300 3000 150 3000 LEY40A / LEYG40A LEY40B / LEYG40B LEY40C / LEYG40C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 20 300 10 300

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350

Compact 5-Port Solenoid Valve

This allows for space saving , weight reduction , and a large flow rate . 1 The cylinder speed is 300 mm/s.

Base Mounted Metal Seal/Rubber Seal Series VQ

Lead wire length Socket (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Note)AXT661-31A-, for 100/110 VAC. AXT661-34A-, for 200/220 VAC.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 55 60 65 70 75 80 85 90 95 130 155 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) Approx. 300 33.1 48.5[55.5] Refer to page 563 for dimensions with connector cable.

SYJ300/500/700

76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 38.7 Approx. 300 (Lead wire length) 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 4-4-61 for dimensions with connector cable.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

17.7 17.8 17.9 18.0 19.5 19.7 19.8 19.9 20.0 24.5 24.7 24.8 24.9 25.0 Symbol 175 177 178 179 180 195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E G Without lock With lock 50, 100, 150 4 130 200, 250, 300 6 2 300 280 350, 400, 450 8 3 450 430 500, 550, 600 10 4 600 580 650, 700, 750 12 5 750 730 800, 850, 900 14 6 900 880 950, 1000 16 7 1050 1030 23 314.9 359.9 6 130 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line

JXCx-OMU0004

2500 225 2500 15 700 3000 360 3000 1100 3000 750 3000 400 3000 LEFS32H LEFS32A LEFS32B LEFS40H LEFS40A LEFS40B 2] 2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 16 200 8 200 30 200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (800) 258-9200-www.stevenengineering.com 0.5 400 st 300 st 200 st 300 st 0.5 0.5 200 st 100 st 200 st 100 st 100 st 75 st 75 st 0 0 0 0 0 0 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 3 (Slide bearing type) 2.5 800 st Deflection Y (mm) 2 700 st 600 st 1.5 500 st 1 300 st 400 st st: Stroke (mm

VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cover diameter 1.5 Cross section 0.23mm2 < >: AC 86 78.5 60.5 0 1 02 03 M plug connector (M): VQZ325 (R)lMl Cover diameter 1.5 Cross section 0.23mm2 130<132> (Lead wire) 77 65<66> 300 154.5 Indicator light 62<67> < >: AC 1.12-44 VQZ1000/2000/3000 Base Mounted VQZ3000 3 position closed center/exhaust center/pressure center 3 4 5 Grommet(G): VQZ3 5 (R)lGl 0 1 02 03 130 300 (Lead wire length

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

CLS

2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without