AC Servo Motor Driver (Network card type ）

PF50 100 5 11 5.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT HF3100A-UN [Unit: mm] TF3005C-TX/TX3020C-TX/TF3030C-TX [Unit: mm] 3-M4 6-R3.25 length8 M4 M4 M4 3 M4 Approx.12.2 125 2 140 1 155 2 16 16 IN Approx.67.5 100 1 100 1 3 290 2 150 2 308 5 Approx.160 332 5 170 5 11 32 11.

Smooth Cylinder/Low Speed Cylinder

(mm) FD FT FV FX FZ A B 50 60 56.5 66.5 58.5 68.5 33 43 39.5 49.5 40.5 50.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 REB 32 5.5 8 48 56 65 60 43 M FV 40 5.5 8 54 62 72 REC 66.5 49.5 FT L 4 x FD FX FZ B + Stroke 50 6.6 9 67 76 89 68.5 50.5 CY CY A + Stroke Bore size (mm) Stroke range (mm) L1 M L CX 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 38.5 34 17 MQ 40 38.5 40 17 L1 RHC

CQ2

32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

Air Slide Table

Load mass m [kg] 7 7 6 6 V = 100 V = 100 5 5 4 4 V = 200 V = 200 3 3 V = 300 V = 300 V = 500 2 2 1 1 0 0 20 40 60 80 100 120 140 160 180 200 0 0 50 100 150 200 250 300 L3: Overhang Allowable range: 200 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] 164 MXQ Series Determine the overhang.

Compact Hydraulic Cylinder

5 V 200 V 100 V 3-wire (NPN equiv.)

smcmaintenancepartslist

size 32 3 to 4 1 125 15 to 17 3 100 8 to 10 2 80 6 to 8 1.5 63 4 to 5 1.5 50 3 to 5 1 40 3 to 4 1 100 st Extra 50 st 344 Series CL1 40 to 100 Replacement Procedure of Seal 3 6.

Made to Order

Bore size (mm) 20 25 32 40 50 63 80 100 MGPM MGPL MGPA DA AW B EW FD FB MT Bore size (mm) 10 10 14 14 20 20 25 30 74 74.5 82.5 89 95 100 120.5 143 6 6 7 7 7 7 8 8 63 63.5 69.5 76 82 87 106.5 126 5 5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

Battery-less

0 Work load m [kg] 0 1 2 3 4 5 600 Horizontal/Bottom 500 L2 400 L2 [mm] 300 Y Me m 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 L3 [mm] m 300 L3 Z 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 L4 400 L4 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 m L5 [mm] 300 Wall L5 Y 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 400 L6 [mm] L6 300 Z 200 Me m 100 0

Electric Actuator/Slider Type

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-V Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

Table of Contents

100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) 12-4-4 5 Parallel Style Wide Opening Air Gripper

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Mechanically Jointed Rodless Cylinder Series MY1

Secure the adjusting bolt at the position where it protrudes approximately 0.5 mm from the shock absorber. 100 1 2 3 4 5 10 20 30 100 2 3 5 10 20 50 40 50 100 30 m2 max. m1 max. m3 max. m2 max. m3 max. m1 max.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Rated voltage For DC 5 24 VDC 6 12 VDC Electrical entry V 6 VDC S 5 VDC 24, 12 VDC 100, 110 VAC 200, 220 VAC DIN terminal 24, 12 VDC 6, 5, 3 VDC R 3 VDC 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC For AC ( Hz) 50 60 Grommet L plug connector M plug connector M8 connector WO: Without connector cable W: With connector cable Note 1) 1 100 VAC 2 200 VAC G: Lead wire length 300 mm H: Lead wire

LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

Table of Contents

2 4 (EA) (P)(EB) 5 1 3 3 position pressure center (B) (A) 4 2 5 (EA) (P)(EB) 5 1 3 How to Order Pilot Valve Assembly SF4 22 F 1 Coil rated voltage Symbol Rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in