CV/MVGQ

(n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 75 80 90 100 100 100 75 80 90 10 35 55 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

d9 20 25 32 40 42 16 28 43.4 143 164 168 189 193 214 42 20 28 48 150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 6-5-12.

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

Air Cylinder

156 180 181 205 206 230 231 255 40 Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 309.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

Table of Contents

(Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.

Air Cylinder Series CA2

30 30 30 30 34 30 31 31.5 31.5 30 30 37 71.5 81.5 38.5 38 73 69 81 69 37.5 46.5 34 34 34 34 34 38 34 35 35.5 35.5 34 34 42 76.5 86.5 42 42 78.5 77 86.5 77 43 52 41 41 41 41 41 44 41 41.5 43 43 41 41 49 83.5 93.5 46.5 47 85.5 91 93.5 91 51.5 58.5 49 49.5 49 49.5 49 52.5 49 50 51 51 49.5 49 57.5 92 102 53.5 53.5 94 107 102 107 58.5 66 55.5 57.5 55.5 56.5 56 61 56 58.5 57.5 57.5 56.5 56 68

LG1H

30 A A A A Stroke Stroke Stroke Stroke 700 550 700 560 100 100 800 650 800 660 200 60 200 50 900 750 900 760 300 160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

275 51 75 112 250 64 12.5 25 37.5 50 100 103 250 225 86 200 241 175 216 30 150 191 341 125 166 316 30 100 141 291 56 75 128 266 68 12.5 25 37.5 50 116 103 250 225 91 200 241 175 216 32 150 191 341 125 166 316 32 100 141 291 56 75 128 266 76 12.5 25 37.5 50 116 130 200 180 119 160 140 220 40 120 200 320 100 180 300 40 80 160 280 75 60 150 260 82 10 20 30 40 140 240 60 ISO Standards Air

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

AC servo motor (Incremental encoder) 200 W PNP 3pcs.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

C95

From 0.4 MPa Graph (6) m From 0.5MPa Graph (7) F 6-12-27 Series C95N Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 40 30 50 40 30 32 50 40 20 20 32 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum

10

56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

Table of Contents

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

17

ball bushing, 30 stroke, and the speed of 200 mm/s.

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3