VCL

Note 3) Vibration resistance Conditions when tested with one sweep 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occurred when tested.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

IDG

) Outlet air flow rate Note) (l /min (ANR)) Outlet air flow rate Note) (l /min (ANR)) Series (l /min (ANR)) (l /min (ANR)) IDG1 IDG3 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 10 25 50 100 200 300 500 600 750 1000 IDG3H IDG5H IDG10H IDG20H IDG30H IDG50H IDG60H IDG75H IDG100H 25 50 100 200 300 500 600 750 1000 Unit Type Single Unit Type IDG30L IDG50L IDG60L IDG75L IDG100L 75 110 170 240

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For details

VZ5000

0.35 0.84[0.25] Rc 1/4 Rc 1/4 0.44 0.27[0.56] 0.47 0.60 0.87[0.43] 0.58 0.46 0.45 0.23[0.55] 3 position VZ 240(160) Note 1) [ ]: Denotes the normal position.

Electric Rotary Table

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 Step Motor (Servo/24 VDC) 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150

CM2

Symbol S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ Bore 87 140 149 112 165 174 137 190 199 20 87 144 153 112 169 178 137 194 203 25 89 149 161 114 174 186 139 199 211 164 224 236 32 113 178 190 138 203 215 163 228 240 188 253 265 213 278 290 40 Built-in One-touch fitting Pivot bracket (mm) 1 to 50 51 to 100 151 to 200 201 to 250 101 to 150 LD LF LG LH LP LT LV LY Bore Bore P Q LZ LZ LZ LZ LZ 6.8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) Standard stroke 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 Caution Manufacture of Intermediate Stroke Snap Ring Installation/Removal Description Spacer is installed in the standard stroke body. Exclusive body (-XB10) Refer to How to Order for the standard model no. on page 7-6-121. Suffix -XB10 to the end of standard model no. on page 7-6-121. 1.

CQ2

Rod end male thread Nut 16 88 2 110 121 132 143 232 4 99 8 16 34 34 64 64 98 Rubber bumper 20 135 0 169 186 203 220 237 254 271 288 54 0 152 2 2 3 7 12 19 34 One-touch fitting 25 182 216 233 250 267 284 301 318 335 199 12 12 21 21 Foot (including bolt) 32 1117 247 52 295 319 343 367 391 415 439 463 487 511 65 271 153 177 159 171 267 349 735 Flange (including bolt) 1056 40 1365 370

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

EX120/121/122

(EX250-SAS7 Max. 240 mA, EX250-SAS9 Max. 120 mA) Note 6) When the SI unit is mounted to the manifold when shipped, accessories are shipped together with it.

SYJ300/500/700

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500

VZS

DXT170-176-2-01 DXT170-176-2-02 100 VAC 200 VAC 100V 200V DXT170-176-2-03 220V 110V 110 VAC DXT170-176-2-04 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 240V 6VD 12VD 24VD 48VD 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC Circuit diagram DC Circuit diagram D: Protective diode LED: Emitting diode R: Resister NL: Neon bulb R:

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

Profile Design ISO/VDMA Air Cylinder Series CP95

310 370 0.6 270 230 300 220 270 330 0.7 240 210 270 190 240 290 0.8 210 190 250 170 220 270 0.9 190 170 230 160 200 240 1 170 160 210 140 190 220 CD 0.2 1200 920 1150 1330 0.3 760 960 730 910 1050 C 0.4 640 820 620 770 890 0.5 570 720 540 680 780 D 0.6 630 510 650 490 610 700 0.7 560 460 600 440 550 640 0.8 510 430 550 400 510 580 0.9 470 400 510 380 470 550 1 430 370 480 350 440 510

Process Valve Series VNA

Pilot solenoid valve DIN terminal with light/surge voltage suppressor Note) Except 12 VDC, 240 VAC, other voltages.

4/5 Port Solenoid Valve

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 39 Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5 (For mounting) 13 36.9 (DIN 38.1) 21.5