Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A high filtration Mist Separator (Series NAFM) installed behind a regular filter (Series NAF) can prevent foreign particles from entering the valve. 10-32 Nom (M5) 13.0-17.3 (15-20) 1/8 NPTF 60.7-78.0 (70-90) 1/4 NPTF 104-121 (120-140) 3/8 NPTF 190-208 (220-240) 1/2 NPTF 242-260 (280-300) 3/4 NPTF 242-260 (280-300) Mounting Single-acting valves can be mounted in any direction.

AC Servo Motor Driver (Network card type ）

Load-side encoder initial 70.7 DB communication error 1 Load-side encoder initial communication Incompatible encoder (Note 6) 70.8 DB 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB

Electric Actuators

2.2 2.2 Lead 10 (LEPS10J) 1.1 1.1 0 350 300 0 50 100 150 Speed [mm/s] 0 350 300 0 50 100 150 Speed [mm/s] 200 250 200 250 Force Conversion Graph (Guide) LEPS6 (Basic) 5.6 Lead 4 (LEPS6K) 4.5 Force [lbf] 3.4 Lead 8 (LEPS6J) 2.2 1.1 0 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 70 10 80 100 50 5 LEPS10 (Basic

Sine Rodless Cylinder Series REA/REB

Number of axes 10 150, 200, 300 Symbol Specifications 150, 200, 300, 400, 500 15 750 1 axis XB10 Intermediate stroke (Using exclusive body) 200, 300, 400, 500, 600 20 1000 X168 Helical insert thread specifications 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Stroke exceeding the standard stroke will be available upon request for special

Air Cylinder Series CA2

Bore size Standard stroke Long stroke (L and F only) CS1 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 Symbol Specifications CS2 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 -XB5 Oversized rod 50, 63 1200 Heat resistant (150C) -XB6 -XC3 Special port positions 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Load-side encoder initial communication error 1 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB 70.E Load-side encoder initial communication Process error 5 DB 70.F Load-side encoder

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

V100

Note) Standard lead wire length: 300 mm.

Table of Contents

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Refrigerated Air Dryers Series IDF/IDU

SF 300 352 243 343 300 352 243 343 397 IDF22E-30 SFD IDF-TB405 630 600 12 IDF22E-20 773 70 805 LLB IDF37E-30 IDF-TB406 710 680 13 AD IDF37E-20 675 GD 943 IDF55E-30 437 IDF-TB409 730 750 60 925 15 397 1043 IDF75E-30 437 IDU-TB/Dimensions (mm) Applicable dryer Part no.

240

or less 100 70 30 3 100 15 1 LEC 11.

CV/MVGQ

15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

CV/MVGQ

13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26 0 0.033 0 0.039 42.5 50 21.5 16 M14 x 1.5 14 39 30 7 21 15 46.5 24 10 84.5 Up to 300 22 8 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350