Stability of suction position, Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4
Single 114.5 300 (Lead wire length) Single 99 300 (Lead wire length) With light/surge voltage suppressor Plug connector (M) DIN terminal (D) With light/surge voltage suppressor 3 position 176 Double 168.5 Single 108.5 300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n
MHZL2-20 27.6 270 With One-touch fitting With M3 port With M5 port With hose nipple Basic type (tapped in open/close direction) Side ported Side ported Side tapped Flat type finger Through-holes in open/close direction With One-touch fitting for coaxial tubing DMHZL2-25 33.6 470 Closed Series Variations Open Values inside ( ) are for standard series MHZ2. 20Action Bore size (mm) Series A
MHZL2-20 27.6 270 With One-touch fitting With M3 port With M5 port With hose nipple Basic type (tapped in open/close direction) Side ported Side ported Side tapped Flat type finger Through-holes in open/close direction With One-touch fitting for coaxial tubing DMHZL2-25 33.6 470 Closed Series Variations Open Values inside ( ) are for standard series MHZ2. 20Action Bore size (mm) Series A
200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.
291 15 287 274 14 270 257 13 253 240 12 236 223 11 219 206 10 202 189 9 185 172 8 168 155 7 151 138 6 134 121 5 117 104 4 100 87 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 46 5 Port Solenoid Valve Base Mounted
750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range
st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st Over 30 st to 100 st Over 25 st to 100 st Over 100 st to 200 st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st 12 16 20 25 32 40 50 63 300 300 167 167 20 24 24 24 300 300 300 300 171 172 174 174 24 24 24 28 105 105 117 117 40 44 44 44 121
Standard length is 300 mm, but the following lengths are also available.
Standard length is 300 mm, but the following lengths are also available.
72 64 [65.3] 123 87.8 [90.4] 103.8 [106.4] (Lead wire length) 300 41.6 300 54 [60.5] (Lead wire length) [ ] for AC Other dimensions are the same as the grommet style
stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375 385.5 18 353 365 387.5 398 19 372 384 412.5 423 20 391
Standard length is 300 mm, but the following lengths are also available.
distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor
59.6 [66.6] Approx. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.
Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100
Exhaust center VFS5410 VFS5400 55 or less 1.14 300 Pressure center VFS5510 VFS5500 55 or less 1.14 300 Double check VFS5610 60 or less 1.99 180 Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.