0.4 @ $4% $5% 6 . + $4% $5% 7 6 . % # A * # # ! ! $4% $5% . ! $4% $5% ;6 6 $4% $5% ) . $4% $5% 0 + $4% $5% . + 8 $4% $5% ; . $4% $5% 7 . 9 $4% $5% <' . $4% $5% ;6 . : $4% $5% 6 8 $4% $5% . ! $4% $5% ) 0 9 $4% $5% ; 0 8 9 ! $4% $5% 0 : $4% $5% <' 6 !! $4% $5% ;6 ) : $4% $5% 0 6 ! $4% $5% <' ) $4% $5% 0 ) !+ $4% $5% 6 0 ! $4% $5% 7 ) ! !
Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.
VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.
to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR)) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650
Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement
to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3000 Actuator specifications Positioning repeatability [mm] Basic type 0.02 High precision type 0.015 [mm] Basic type 0.1 or less Lost motion Note 3) High precision type 0.05 or less Lead [mm] 10 5 12 6 16 8 20 10 Impact/Vibration resistance [m/s2] Note 4) 50/20 Actuation type Ball screw
75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300
U PF3W 5 1 Remote sensor unit PF3W 7 11 25 A M Integrated display U Made to Order Type Seal material EPDM X109 5 7 Remote sensor unit Integrated display (Refer to page 17.) Bracket (Option) Nil None Bracket Rated flow range (Flow range) Symbol Rated flow range 11 21 10 to 100 L/min 30 to 250 L/min Note) With bracket is R not available for 250 L/min type.
) Stroke (mm) IN-777-250TF-350F*-HL 350 250 IN-777-250TF-450F*-HL 450 23 (5) Bore size: 320 (mm) Stroke (mm) Dimensions (mm) Product number Bore size C D E 200 34 233.5 612.5 IN-777-320TF-200F*-HL 320 IN-777-320TF-350F*-HL 350 90.5 290 669 IN-777-320TF-530F*-HL 530 24 4-5.
5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance
5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.
5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.
5 @5 !4 REBR15 Component Parts Component Parts No. Description No.
connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)