Programless controller Step motor (servo 24 VDC)

3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

ITV

0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Supply pressure (MPa) Series ITV205 Linearity Hysteresis Repeatability 1.0 0.9 1.0 0.5 Output deviation factor (%F.S.)

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

Table of Contents

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118

Mechanically Jointed Rodless Cylinder Series MY1

, 275, 300 15, 25 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 16, 20, 25, 32 MY1H 50 to 600 601 to 1500 (1000 for 16 to 20 only) 16, 20, 25, 32, 40 CXWM MY2C 100 to 2000 2001 to 5000 (Up to 3000 for 16) 16, 25, 40 25 to 200 CXWL 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) MY2H/HT 50 to 600 601 to 1500 (Up to 1000 for 16) 16, 25, 40 ML1 100 to 1000 1001 to 2000 25, 32, 40 MY3A MY3B MY3M

0.4

Options Station 9 Station 21 L Station 10 Station 22 Station 11 Station 23 A C B Station 12 Station 24 Station 13 Flat ribbon cable kit (P kit), PC wiring system compatible (J kit) For single wiring SSQ1000 P 40A 250 Symbol (L dimension) 190 210 230 250 270 290 310 330 350 370 390 410 Symbol (L dimension) 430 450 470 490 510 530 550 570 590 610 630 Stations Stations Station 2 Station 14

VQZ1000/2000/3000

141 152 L1 L2 L3 18 50 62.5 75 87.5 100 112.5 125 125 137.5 150 162.5 175 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 173 185.5 n L L1 L2 L3 13 14 15 16 17 18 19 20 21 22 23 24 163 174 185 196 207 218 229 240 251 262 273 284 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 300 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 How to Order Double check block

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

17.7 17.8 17.9 18.0 19.5 19.7 19.8 19.9 20.0 24.5 24.7 24.8 24.9 25.0 Symbol 175 177 178 179 180 195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

JXCx-OMU0004

2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ]

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

ISO Cylinder

1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 93 118 143 168 122 147 172 197 165 190 215 240 40 114 139 164 189 214 147 172 197 222 247 199 224 249 274 299 Boss-cut/Basic [mm] Item Stroke Bore size S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 93 118 143 168 151

High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

Electric Actuator

5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A

15

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

Refrigerated Air Dryers Series IDF/IDU

Note Note 1) Value when cooling water inlet temperature is 32C and with rated load Note 2) Calculated at 1 RT = 3,300 kcal/h IDF-S0302 230 VAC IDU3E to 37E-23 IDU55E, 75E-23 IDF-S0198 (mm) Dimensions A B C D E Model IDF120D IDF150D 180 250 160 90 225 IDF190D IDF240D 180 250 160 48 273 IDF120D to 240D B Cooling water outlet A Condensation pressure gauge Cooling water inlet E D C Drain plug

HRX-OM-Q026

/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-

energy saving effect

Page 179 165 A Thermo-chiller Air-cooled 200 V Type Inverter Type (UL Standards) RoHS HRSH Series How to Order A 20 HRSH 250 Cooling capacity Option 100 10.5 kW 150 15.7 kW 200 20.5 kW 250 25 kW 300 28 kW Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note 1) With fluid fill port S Note 2) Conforming to CE/UL standards Cooling

Proposals for Energy Saving

KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.