PFM7.eng

Flow adjustment valve [dr E] Display resolution [PrS] Auto-preset [EEP] Accumulated value hold [1E2] 100-split [oFF] Manual [oFF] OFF Used to lock the flow adjustment valve. Lock ring Warning: Danger: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Used to mount the product on a DIN rail or directly to a panel.

PFM3.eng

condition [F 4] [F 5] [eES] Response time [1.00] 1 second Specifications / Outline with Dimensions [F 6] [dSP] Display mode [ inS] Instantaneous flow [F 7] [ inP] External input [ r_r ] Accumulated flow external reset Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about the product specifications and outline dimensions. [1E2] 100-split [dr

DOC1003077

Apr R AR BR CR DR ER FR . May S AS BS CS DS ES FS . Caution If instructions are not followed there is a possibility of injury or equipment damage. Jun T AT BT CT DT ET FT . When dispose the product, contact an industrial waste disposal company for disposal of the product. To minimize the risk, drain the fluid from the product when it is scrapped.

HEC-OM-Y008

To ensure safety of personnel and equipment the safety instructions in *Cooling capacity decrease approx. 20W when high pressure pump option selected This unit has several interlock functions, which activate when a dangerous Apr R yR ZR AR BR CR DR . this manual and the product catalogue must be observed, along with other relevant safety practices. operation or condition occurs to stop the

CEx-OMI0064

350ms ,PLC ,10100ms ,150ms , ,300ms,, 10100ms (+150ms) ms 300ms 150ms ON ON OFF 10~100ms 10100ms *8 RS-232C ,CEU5 CEU5 2 , ,2 *9 () ,DC 1 , 2.5s ,3s *10 30ms ON 24 - ,,, ,, , 2ROM) 7-4 (E 2ROM (1)E / 2ROM ,E RS-232C NO. 2ROM , ON,E 2ROM ,E 2ROM 80 ,LCD E2FUL SMC (2)E , (3),,LCD E2Err 25 - 8 RS-232C 8-1 RS-232C 1200,2400,4800,9600,19200bps ASCII 1 7 1 8-2 (1) VR DR

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

IDX-OM-W037

Checks and Maintenance Checks and Maintenance Check PointsPRODUCT NAME T hermo dr yer There are no abnormal smell or smoke coming from the equipment. MODEL Original Instructions 4.2.1 ID H410, IDH4 20, IDH A4 23 ID H6 10, IDH6 20, ID H A623 IDH6This manual is intended to expla in the installation and operation of the product.

CEx-OMB0060

Communication format (1) Command list Command Meaning Count mode Setting mode VR Reading counts DR Reading preset data DW Writing preset data PR Reading pre-scale setting PW Writing pre-scale setting FR Reading indication offset setting FW Writing indication offset setting SR Reading cylinder stop output setting SW Writing cylinder stop output setting OR Reading output type setting OW Writing

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 (9) DIN rail AXT100-DR 5 Length symbols 1 to 40 L = 12.5 x # + 10.5 (#: Length symbols 1 to 40) L Dimension (When selecting the number, refer to L6 in dimension table in the Best Pneumatics No.4 catalog.)

Vacuum Unit Ejector / Vacuum Pump System

VVQ1000 51A C8 One-touch fitting size C8 8 One-touch fitting N9 5/16 One-touch fitting (7) Sound absorbing material (2 pcs. per set) ZK2 SE2 1 A (8) DIN rail AXT100 DR 5 Length symbols 1 to 40 L = 12.5 x # + 10.5 (#: Length symbols 1 to 40) L Dimension (When selecting the number, refer to L6 in dimension table in the Best Pneumatics No.4 catalog on pages 88 to 90.)

MHF2

Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 12-3-23 24 Series MHF2 Body Option: Side Piping Type (mm) MHF2-DR

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

A

0.070 0 CA1-SO6 63 100 70 15 130 110 150 20 11 22 14 55 73 90 10 107 18+0.070 0 80 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 129 25+0.084 0 CA1-SO8 100 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 135 25+0.084 0 D I M E N S I O N S O F FS E T M O U N T I N G B R A C K E T Applicable bore size A B A+B+90 40 ~ 100 12 60 162 Applicable bore size (mm) Part No DA DL DU DC DX DE DO DR

Table of Contents

Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 12-3-23 24 Series MHF2 Body Option: Side Piping Type (mm) MHF2-DR

MHF2

Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 12-3-23 24 Series MHF2 Body Option: Side Piping Type (mm) MHF2-DR

AF800/900

DR Note 3) Symbols "2", "6" and "8" can not be specified at the same time. (Ex.) 68 Note 4) Symbols "9", "D", and "J" can not be specified at the same time. (Ex.) 9 specified at the same time. (Ex.) 9DJ 2 2 Flow rate (l/min(ANR)) The bowl of series AL is used.

MHF2

opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 +0.1 0 Close: 0 E-E Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 20 Series MHF2 Body Option: Side Piping Type MHF2-DR

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

Table of Contents

.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length. Specify the valve model no. as shown below for negative COM specification. The manifold no. shown below is for the L kits. For other kits the standard manifold can be used. Please contact for negative COM S kit.