smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

ASS AS131F-M3-23 AS131F-M3-01 7.2 7.2 28.3 17.6 1/8" 28.6 17.9 26.6 24.1 24 21.5 8.4 17.9 17.9 17.6 7.2 28.3 24.1 24 4 3.2 5.5 8.4 4 5.5 10.1 12.7 18.3 12.7 M3 x 0.5 26.6 21.5 7.2 10.1 M3 x 0.5 AS131F-M3-04 AS131F-M3-03 5 28.6 17.9 5/32" 9.3 18.3 9.3 5 4 ASR ASQ AS131F-M5-23 AS131F-M5-01 1/8" M5 x 0.8 M5 x 0.8 19.8 8.4 19.8 3.2 8.4 AS131F-U10/32-23 AS131F-U10/32-01 1/8" 10-32UNF 10-32UNF

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

VQZ1000/2000/3000

13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 28.6 28.6 12.7 7 AS131FG-M5-04 AS131FG-U10/32-03 10.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 M5 x 0.8 22.2 25 10-32 UNF 22.2 28.6 25.8 25 10.8 9.6 9.3 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4

Table of Contents

ARJF310F-01 y e !

Speed Controller with One-touch Fitting

: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 ASR ASQ AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 28.6 28.6 12.7 7 AS131FG-M5-04 AS131FG-U10/32-03 10.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 M5 x 0.8 22.2 25 10-32 UNF 22.2 28.6 25.8 25 10.8 9.6 9.3 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS121F-M3-23 AS121F-M3-01 3.2 7.2 16.1 19.7 26.6 24.1 24 21.5 4 8.4 10.5 7.2 19.7 26.6 24.1 21.5 4 8.4 10.5 10 12.7 5.5 5.5 16.1 24 10 12.7 M3 x 0.5 M3 x 0.5 AS121F-M3-04 AS121F-M3-03 4 9.3 5/32" 9.3 AS121F-M5-23 AS121F-M5-01 1/8" M5 x 0.8 M5 x 0.8 17.3 8.4 17.3 22.1 3.2 22.1 8.4 AS121F-U10/32-23 AS121F-U10/32-01 12.7 1/8" 10-32UNF 10-32UNF 9.6 12.3 7 12.7 25 12.3 28.6 25.8 22.2 8 AS121F-M5

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

F

16 6.0 6.0 13 4 1/4 KQT04-02S 14 10.4 10 18 26 25 16 6.0 6.0 19 6 M5x0.8 KQT06-M5 8 12.8 8 20 16 18 17 4.3 4.3 8 6 1/8 KQT06-01S 10 12.8 10 20 23 25.5 17 13.9 13.9 13 6 1/4 KQT06-02S 14 12.8 10 20 27 27.5 17 13.9 13.9 21 6 3/8 KQT06-03S 17 12.8 10 20 29 29 17 13.9 13.9 35 8 1/8 KQT08-01S 12 15.2 12 23 24.5 28 18.5 26.3 18.2 15 8 1/4 KQT08-02S 14 15.2 12 23 28.5 30 18.5 26.3 18.2 23 8 3/8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

AS-FG/ASD-FG

Min. 9.6 25.8 12.3 28.6 AS121FG-M5-23 AS121FG-U10/32-01 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 x 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 14.2 31.1 14.3 36.1 AS221FG-01-23 AS121FG-U10/32-03 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R(PT)1/8 8 10-32UNF 28.6 25.8 25 22.2 7 9.6 21.3 26.1 12.3 AS121FG-M5-04 AS121FG-U10/32-05 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 x 0.8 11.7 9.6 25.8 28.6 8 7 25