Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Modular F.R.L. Unit

03 04 Note 6) VHS40-06 01 02 VHS20VHS30VHS4002 03 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 Note 6) Piping adapter E400E100-M5 02 03 04 06 Note 6) Pressure switch with piping adapter IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Note 6) Y14-M5 Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection

Modular/F.R.L. Units Series AC

-02 03 3-port valve for residual pressure release Note 7) VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E500-06 Piping adapter Note 7) E100-M5 02 IS1000E-3003 04 01 IS1000E-2002 03 Pressure switch with piping adapter Note 7) Y54-03 04 Y24-01 02 Y34-01 02 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-37-4A Thread type 1 2 3 Stations Rc Nil A, B port size G F Thread piping N NPT Symbol Port size M5 x 0.8 10-SY3000 Applicable series NPTF T 10-SS5Y3-41P-06-C6 Manifold base (6 stations) 10-SY5000 M5 Except M5 01 1 8 10-SS5Y3-41P-06-C6 1set (Type 41P, 6 station manifold base part no.)

ZP3

UM e Connection thread (Male thread) Width across flats D M5 x 0.8 A5 M5 x 0.8 B 3 A Model A B C2 D Vacuum inlet direction q Pad dia.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

VM

02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

V

(0.05) (N)VZ110--M5 NC 0 ~ 7MPa 0 ~ 100PSI Body Ported 10-32Nom (M5x0.8) 0.15g 22in-Hg VAC 0~85PSI ~55PSI 0 ~ 5MPa 0 ~ 70PSI R->A 0.6 (0.034) A->P 0.6 (0.034 (N)VZ110--M5 NO S A F E T Y Note: In case of (N)VZ120 Supply Air to 'R' Port.

Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

Modular Design with Uniform Body Style

drain cock C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Nylon Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

One-touch Fittings

A 06 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

VM

-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller plunger VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Cross roller plunger VM120-01-07 VM120-01-07S VM130

Table of Contents

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

SY

port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 x 0.8 46g (with 05), 50g (with 06) 20g 66.8g 60.4g Weight With pressure gauge With plug P to A, B A, B to EA, EB 4.05mm (0.22) 2.45mm (0.13) 3.91mm (0.21) 11.1mm (0.61) 7.61mm (0.42) 10.1mm (0.56