Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

1 8 : : 20 stations 20 R port Rc(PT) 1 8 40 Type (5 Port/Base mounted) Applicable solenoid valve SYJ5l40-l SYJ5l43-l SYJ5l50-l SYJ5l53-l Applicable blank plate assembly SYJ5000-21-1A How to Order SS5YJ5-40-05 -M5 P port Rc(PT) 1 8 Stations 02 2 stations : : 20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Modular/F.R.L. Units Series AC

G46-2-02 G46-10-02-L G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Table of Contents

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

Clean Gas Filter

SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint

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Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

modular-press-e

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 34.5 37.2 Cable type (TT) 52-SY5140 (R) -TT-02 Max.10 L 120.8 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes)

VEX1

1 8 1 4 T NPTF Note) (Only with solenoid) Electrical entry Without sub-plate Nil Rated voltage (Only with solenoid) Symbol Electrical entry 02 03 1 4 3 8 42 Grommet, Lead wire length 300 mm Grommet, Lead wire length 600 mm G H 1 2 3 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 04 1 2 L L plug connector, lead wire length 300

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Secondary Batteries

pre-wired connectorSDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900 and DY7BW(V)L-900.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

ASR ASQ AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

gasket positioning Rc(PT)1/4 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ312 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ312 (R)wLwC6, C8, C10, 02 VZS 107.5 <108.5> 300 VFS (Lead wire length) 71 <72> Indicator light VS VS7 111.5 MAX.10 31.5 <35> Applicable cord O.D.

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: 0.62(n1) + 2.6 F, L, T1 kits 12 stations L F kitD-sub connector L T kitTerminal block box L T1 kitIndividual terminal block kit L L kitLead wire L S kitSerial transmission 3/8 1/2 Side 3/4 Option Direct exhaust with silencer box SV VQ5l00 VQ5l01 T kit 12 stations VQ5000 VV5Q51-lll Not including valve weight.

I

ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS

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Stainless Steel 316 Fittings KFG2 Series RoHS Compact and Light Compact and Light Compact and Light KQ2 KQB2 Approx.44% KS KX New New Current model Shorter Dimensions KM KFGL0806-02S KFG2L0806-02 KFG2L0806-02 31.2 mm 17 .4 mm KF Approx.37% M Lighter Weight H/DL L/LL KFG2L0806-02 KC 38 g 24 g KK KK130 Material DM KDM KB Grease-free/Can be used with steam.