SY3000/5000/7000/9000 Series (Pilot Valve:V100)

D type for 2 to 8 stations; No.10 SY3000-43-1A-10 One-touch fitting for1/4 VVQ1000-50A-N7 One-touch fitting for5/32 VVQ1000-51A-N3 One-touch fitting for1/4 VVQ1000-51A-N7 SY5000 One-touch fitting for5/16 VVQ1000-51A-N9 Note 1)P and R ports cannot be changed. Note 2)Use caution that O-rings must be free from scratches and dust. Otherwise, air leakage may result.

Intrinsically Safe Valve

length) 120.8 Max. 10 5 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 22.6 2 A B C 16.7 53-SY5 20-L-01 (-F2) 2 x M3 x 0.5 thread depth 3.5 (For mounting bracket) 65.4 Insulator: Black () 11.6 A B Insulator: Red (+) 2 x 3.2 (Manifold mounting hole) 16.2 Manual override 36 2 x 1/8" {A(4), B(2) port} 37 (2 x

SJ3A6

2!

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 2 3 08 D0 N ( 00T) D For P, R port inch sizes Kit designation Plug-in Series VQ2000 1 2 4 3 Option 4 Nil Electrical entry/Cable length Stations 1 2 Note 2) 01 Kit designation Entry direction Standard stations Kit, Cable length 1 station None Specifies DIN rail length Note 2) 02 to 24 B K N R S With back pressure check valve on all stations Special wiring specifications

Plug-in Unit

2-32 Base Mounted Series VQC VQC1000/2000/4000 Kit (Serial transmission kit) for I/O S IP67 compliant VV5QC41 S Kit (Serial transmission kit: EX250) 3(R) port 2-Rc 3/4 M12 female thread Input connector 1(P) port 2-Rc 1/2 M12 male thread Communication connector M8 female thread Input connector SMC SMC SMC SMC SMC SMC SMC 101 95.5 3 2 1 0 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 15.7 77.5 0 20.5 BUS

Vacuum Regulator

P601010-2 P601020-2 Valve assembly 2 HNBR, etc.

PFM7

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

Flow Sensor Series PFMV

), Residual voltage 1 V or less (at load current 80 mA), With short-circuit protection Response time Switch output: 2 ms (10 ms, 50 ms, 0.5 s, 1 s can be selected.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Except for M5 N3 N7 N3 N7 N9 N9 N11 N9 N11 One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting 5 32" 10-SY3000 Made to Order 3 position pressure center 1 4" 2(B) (A)4 5 32" Main valve fluororubber (Refer to page 169.)

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

SY3000/5000/7000/9000

One-touch fitting for 4 C4 2 position double SY3000 One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 For DC One-touch fitting for 6 C6 SY5000 5 24 VDC 6 12 VDC One-touch fitting for 8 C8 SY9000 has no bracket.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

0 Plate assembly i Pad ZHP1 PL A 1 N ZP3E 80 BM Holder Pad material N NBR S Silicone rubber U Urethane rubber F FKM Size (Applicable pad dia./form) 1 63/80: Flat type, 63: Bellows type 2 80: Bellows type Plate Part number for a set of plate and holder Pad form !2 One-touch fitting (The order lot is 10 pieces.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) VQZ100 VQZ100-S-01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

VQ1000V-OMV0001

VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

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Note 2) For NPT rhread type Note 2) Dfan glde s G1/4 (app cab e ro AFD30 and 40). Port size Accessories li.