SMC Corporation of America
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Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-

ARM5B R 06 A Individual Supply Type 3. Semi-standard 1.

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 VQ4551 (A) VQ4550 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description Material Note Number Body Spool

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

How to Order Manifold Example/Valve VV5QZ15 08 N7 N C T VQZ2150R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold 06C6C R Rc(PT) VV5QZ25 N NPT T NPTF F G(PF) External pilot specification. Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

1 2 3 43 Description Pressure gauge Gauge nut O-ring R 1/8 23.5 3 breathing port 1 to 3 are assembled before shipment. 39.5 2-Color Display High Precision Digital Pressure Switch Part No.

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch