100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

IR1000/2000/3000

5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !0 t Valve guide Valve guide Replacement Parts IR100 IR200 IR300 IR2120 IR3120 Part no. No.

•

Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Digital Pressure Switch

for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Precision Regulator

IR3000 : G43-2-01 G43-P2-N01-X30 IR3010 : G43-4-01 G43-P4-N01-X30 IR3020 : G43-10-01 G43-P10-N01-X30 Set pressure Thread type NIL:Rc F:G 0: 0.01~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa N:NPT (Note 3) The pressure gauge is not attached and becomes bundled shipment. 4. Marking on product Product name plate MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.

IR10-OM00007

/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

Precision Regulator

IR2000 : G43-2-01 G43-P2-N01-X30 IR2010 : G43-4-01 G43-P4-N01-X30 IR2020 : G43-10-01 G43-P10-N01-X30 Port size 02 : 1/4 Note4) Set pressure Thread type NIL:Rc N:NPT 0: 0.005~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa F:G (Note 3) The pressure gauge is not attached and becomes bundled shipment. (Note 4) One type only. 4. Marking on product Product name plate MAX.SUP.PRESS. MAX.SUP.PRESS.

Precision Regulator

IR1000 : G33-2-01 G33-P2-N01-X30 IR1010 : G33-4-01 G33-P4-N01-X30 IR1020 : G33-10-01 G33-P10-N01-X30 Set pressure Thread type NIL:Rc N:NPT 0: 0.005~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa F:G 4. Marking on product Product name plate Production lot no. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa OUTPUT PRESS. OUTPUT PRESS. OUTPUT PRESS.

Vacuum Pad: Ball Joint Type

Adapter z c Pad x W Pad W Horizontal lifting Vertical lifting This type of application should basically be avoided. 726

VZM400

5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: Without calibration certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 0.5 to 25 (12.5), Accessory: None, Option: None, Analog Current Output(mA): None

Digital Pressure Switch

Connector pin numbers -18No.PS-OMM0005-J Internal circuit and wiring example Z/ISE10(F)Output specification -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 2 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage 2 V or less -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 2 V or less Analogue voltage output Output impedance approx. 1 k -E

PFxx-OMJ0005CN

0.835.3 1.888.3 4177 8353 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 CO2 0.817.6 1.844.1 488 8176 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 N2Ar 0.837.1 1.892.7 4186 8371 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 / CO2 0.818.5 1.846.3 493 8185 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 -2 0.1 CFM10 -2 1 CFM10 -2 1 CFM10 -2 / 0.1 CFM10 / 0.09.0 0.09.9 09 09 310 -1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft

Common Supply Regulator

/4 53 86.5 30.5 26.5 M38X1.5 31.5 3.5 14.5 37.5 68 37.5 69 37.5 69 AR40M-D 3/81/2 1/8 1/43/8 70 91.5 35.5 35.5 M42X1.5 40.5 0 14.5 42.5 78 42.5 78 42.5 78 Optional specifications Optional specifications Square embedded type pressure gauge Right angle square type pressure gauge Digital pressure switch Bracket mount Panel mountNote 2) Model H J H J H J M N Q R S T U V W Y Z AR20M-D 28 27 28

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

PFM7

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector