3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

123 5 91 102 125 135.5 6 107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

SYJ VQZ300 Port size Symbol VQZ200 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 1 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VK (A) 2 N.O.

RSQ

B 48 52.5 54 N 5.5 5.5 6.6 O1 M6 x 1 M6 x 1 M8 x 1.25 R 10 10 14 Model RSQA32 RSQA40 RSQA50 These 3 figures show the piston rod extended.

CL

#12) 3.1-24 CLM2T20SCLM220, #8 (#1+#8+#12) CLM2T25SCLM225, #8 (#1+#8+#12) CLM2T32SCLM232, #8 (#1+#8+#12) Fine Lock Cylinder/Double Acting Single Rod Series CLG1 20, 25, 32, 40 How to Order CL MLGC CLG1 100 L E N 25 Standard CNA CDLG1 With auto switch 100 L E N 25 C73 CB CV/MVG Auto switch fine lock cylinder Number of auto switches CXW 2 1 n S n Auto switch CXS Mounting B L F G U T D Without

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

SYJ300/500/700

Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1

Combination Cylinder

) Bore (mm) CXW K KA LZ M MM N P PG PH PL PW S W H 51 58 58 71 72 e 43 52 52 65 65 f 11.2 11.2 11.2 12.5 14 h 59 66 66 80 81 ZZ 255 284 298 350 370 ZZ 263 292 306 359 379 l 40 50 63 80 100 1/4 3/8 3/8 1/2 1/2 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 6 7 7 11 11 14 18 18 22 26 71 80 99 117 131

3 Port Air Operated Valve Series SYJA300

0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 Body ported for internal pilot SYJ72 Type SS3YJ7-21 Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for

Manifold Specifications

Symbol Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS3 C8 06 51 1 Thread type Series VZS3000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Rc 1 4 02 Stations Embedded type One-touch fitting Applicable tubing

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 1/8 1/4 1/8 1/4 0.59 0.62 0.54 0.66 0.56 0.54 0.59 Body ported for internal pilot SYJ72 Type SS3YJ7-21 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-40 Type SS3YJ7-41 Base mounted for internal pilot SYJ74 1/4 1/4 Type SS3YJ7-42-01 Type SS3YJ7-42-C6 1/4 Type SS3YJ7-42-C8 Body ported for external

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rc(PT) 1/8 SY C4 (for 4) C6 (for 6) C8 (for 8) Rc(PT)1/8 Rc(PT) 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 2 stations:126 Additional station:38 SYJ VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 1(P)port Rc(PT)3/8 3(R)port Rc(PT)1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 2 stations:209 Additional station:60 VZ VT Note 1) Threaded port style.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

VQ20/30

VQ 1M1 2 3 X2 17-2-89 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Mounting hole 2-4.5 through A port C6: One-touch fitting for 6 C8: One-touch fitting for 8 DIN rail mounting 4-M3 x 0.5 Formulas L1 = (n 1) x 29 + 49 L2 = L1 10 L3 = L4 10.5 L5 = L1 11.2 Dotted line: DIN rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19

Digital Flow Switch (Integrated display type)

(Page 74) 8010 0x1F4A 0 R PD conversion equation : b F32 N 8020 0x1F54 0 R Instantaneous flow peak value S16 N -200 to 4000 The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Instantaneous flow bottom value S16 N -200 to 4000 Accumulated flow value measured value (temporary value) S16 N 0 to 9 1 R