2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

RSQ

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Digital Flow Switch (Integrated display type)

R/W Analogue free span Set value S16 4000 Y Setting range 400 to 4200 Set value of Analogue Free Span Function ON 0: oFF 1: 2.0min 2: 5.0min 2200 0x0898 0 R/W Accumulated-value holding function U8 0 Y 2400 0x0960 0 R/W Display OFF mode U8 0 Y 0: on 1: oFF 1 R/W Security code Used/Not used U8 0 Y 0: invalid 1: valid Security code Used/Not used 2410 0x0960 2 R/W Security code S16 0 Y Security

SZ3000

ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

1.90 C8 1.80 0.16 0.23 0.45 0.44 SS5Y5-42 2 to 20 (1) 1/4 1.90 C8 1.90 0.12 0.20 0.43 0.46 Valve stations Location SS5Y7-42 1/4 3.00 C10 3.00 0.12 0.25 0.66 0.75 Base 4/2 (A/B) Porting spec.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

Manifold Specifications

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Hydraulic

Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 M16 x 2 14 depth 8.6 40 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 M20 x 2.5 17.5 depth 10.8 50 71 60 11 28 24 24 8 58 11

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

Guide Cylinder Series MGG

size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13

Smooth Cylinder/Low Speed Cylinder

ANR)) 290 130 Free flow 1.5 7 3.5 Effective area (mm2) 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C Elbow Type (Metal body) Air Flow/Effective Area AS220M-02 AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (L/min (ANR)) 38 7 12 REA Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (L/min (ANR

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore size Stroke CL MLGC CNA -H -R -W -H -R -W N L Front flange: CBA1F Bore size Stroke N