Fieldbus System

Digital Input Unit 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 11.5 R R 8 76.5 12 3 3 X 56.6 (12) 49.5 B B B B B B B B P X P12 30 25 1 1 A A A A A A A A 10 13.5 (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

3 Port Solenoid Valve Series SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 one-touch fitting F G R port N3 5/32" one-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Valve Single Unit

Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For

Fieldbus System

(C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

5 Port Air Operated Valve Series SYA3000/5000/7000 1

8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way,

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

U side D side Stations...3 2 1 Serial unit (D side mounting) 28 Cassette Type Manifold Series SZ3000 How to Order SZ3 5LOZ 1 C6 60 Type of actuation A, B port size 2 position single solenoid C4: 4 One-touch fitting (A) 4 (B) 2 C6: 6 One-touch fitting 1 5 (EA) 1 (P) 3 (EB) A 4 Switch specifications Manual override 2 position double solenoid Nil: Non-locking push type B 2 Nil: Without switch

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

Table of Contents

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

VCC

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit

5 Port Air Operated Valve Series SYA3000/5000/7000 1

fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16" One-touch fitting for VM Symbol Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

, 5/16" 8, 1/4" 2 x 3.2 (For mounting) Normal override (Non-locking) 2 x 3.2 (For mounting) Manual override (Non-locking) 1.8 (Ventilation hole) 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (P , EA, EB port) SYA5120-01 1/8 (A, B port) 1736 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA5000: Body Ported SYA5220-01 2 position double SYA5220(-F2) C4,

7.5

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !