VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

4/5 Port Solenoid Valve

(B) 2 (A) 4 (B) 2 (A) 4 (Ex.) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

V100

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

AS

Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) d Model Weight (g) Lock Unlock Lock Unlock AS22;1F-01-01(S)A 1/8" 7.2 19.1 26.1 (26) 9 (9) AS22;1F-01-03(S)A 5/32" 8.2 13.3 13 1/8 11.6 30.6 29.2 27.5 26.1 19.1 (12.7) AS22;1F-01-07(S)A 1/4" 11.2 20.8 27.8 (27.7) 10 (9) AS22;1F-01-09(S)A 5/16" 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-02-01(S)A 1/8" 7.2 20.9 30 (30.3) 18 (19) AS22;

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

VM

4 NBR y u Brass 5-7-1 59 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-01, 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P=17.5 9 18 P=17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A L2 L1 5 (Pitch) P=17.5 21 + 13.8 15.2 + (4.9) 5.3 7.3 68.1 100.2 [102.4] (For mounting) 4 x 4.5 27.7 20 139.6 [144] 20 20 37.7 66.7 B B P EB EA B B B 127 [131.4] 100.5 A A A A A 16 Manual override (P , EA, EB port) 1/4 +

Table of Contents

F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

Proposals for Energy Saving

accessories T0425 (0.5m) H04-01 (1 pc.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW B B B B B SZ R5.5 31 11 SMC SMC SMC SMC VP4 50 67 S0700 81 1 2 3 4 5 6 7 n Stations D side U side VQ 1(P), 5(R1), 3(R2) port 6 x Rc 3/4 Manual override VQ4 VQ5 SMC 24(23) VQC 179 167 B B B B B B B 132 VQZ 70(71.5) 91 SQ 20 A A A A A A A 3(1) 3(1) 48.5 4(A), 2(B) port 2n x Rc 1/2, 3/4 VFS 51 80.5 EX123: 2 x G 1/2 EX124: 4 x G 1/2 VFR Electrical entry Use a dripproof plug assembly

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR ZPX40H-01-B8 ZPX100H-01-B10 ZPX100H-01-B12 ZPX125H-01-B10 ZPX125H-01-B12 ZY ZPX40H-01-B10 ZPX50H-01-B8 ZPX50H-01-B10 ZPX63H-01-B10 ZPX63H-01-B12 ZPX80H-01-B10 ZPX80H-01-B12 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP Add or deduct the mass shown in the table on the left for order materials.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

VFS

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom