ARM10/11

Handle position 2.

ARM10/11

Handle position 2.

5 Port Solenoid Valve Series SQ1000/2000

N3: 5/32 N7: 1/4 N9: 5/16 Top ports are indicated by LN. R Note 2) Note 1) Except double (latching) type Note 2) Except dual 3 port valve Note 3) When specifying two or more options, enter symbols in alphabetical order 25

SJ3A6

2!

Compact manifold regulator ARM5 Series

PBT 2 B Port plug 2 Bonnet PBT, HNBR Refer to page 705.

Series 10-SV ® EX500 Decentralized Serial Wiring

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

For 3 stations 0 Without SI unit 16 DeviceNet/PROFIBUS DP/ CC-Link/EtherNet/IP For 16 stations A2W Valve stations P, E port location Stations 2 stations Note Symbol 02 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) (1) Double wiring specifications 08 02 8 stations 2 stations (2) Specified layout (up to 16 solenoids possible.)

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

SY3000 SY5000 Port size 2 One-touch fitting 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

Plug-in Unit

Negative COM. 2-2-50 Base Mounted Series VQC Plug-in Unit VV5QC41 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 2-G 3/4 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 77.5 45.5 42.7 15.7 72 SQ 12 20.5 43.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 35 11.5 2-Rc 1/8 (Pilot EXH port) 2-Rc 1/8 (External pilot port) (6.5) 21.5 27 31 38.7 VQ4 VQ5 2n-Rc 1/4, 3/8, C8, C10

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

actuation Port size {2(A) port} (A) 2 N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

size {2(A)port} (A) 2 N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

Vacuum Regulator

P601010-2 P601020-2 Valve assembly 2 HNBR, etc.

VQ1000V-OMV0001

VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000

PFM7

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector