A

m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m Fluid A i r A i r A i r A i r A i r A i r Operating Pressure 0.2~0.6MPa 0.15~0.6MPa 0.2~0.6MPa 0.15~0.6MPa (29~87PSI) 22~87PSI 29~87PSI 22~87PSI Ambient and Fluid Temperature 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) Max Operating Frequency 1 8 0 c . p . m 1 8 0 c . p . m Lubrication N o n l u b e N o n l u

VCC

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit

3 Port Solenoid Valve

Refer to back pages 1 and 2 for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for 3 Port Solenoid Valve Precautions.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 1/8 1/4 1/8 1/4 0.59 0.62 0.54 0.66 0.56 0.54 0.59 Body ported for internal pilot SYJ72 Type SS3YJ7-21 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-40 Type SS3YJ7-41 Base mounted for internal pilot SYJ74 1/4 1/4 Type SS3YJ7-42-01 Type SS3YJ7-42-C6 1/4 Type SS3YJ7-42-C8 Body ported for external

Serial Transmission System Series EX250 Series EX500

-05B-C6 1 set (manifold part no.)

3 Port Solenoid Valve Metal Seal Series VZ200 1

4 Rc 1/8 C6, C8 C6, C8 Rc 1/4 VZ415VZ425Base mounted (Without sub-plate) VVZ400-32A-2 VVZ400-31A-2 VP Port size Rc 1/4 VZ412-01 VZ422-01 Body ported Applicable valve model VG Blanking plate VVZ400-31A-1 VVZ400-32A-1 VP VV3Z4-50-061-C8 Screws and Gasket Assembly Part No.

Secondary Batteries

ZS-24-E Qty. 1 Nil M With unit switching function Fixed SI unit Note) Panel mount + Front protection cover ZS-24-F 1 Note) Fixed units: For compound pressure : KPa For positive pressure : MPa 59 2-Color Display Digital Flow Switch 90-PFM7 Series Integrated display How to Order Integrated display 90 PFM7 10 C6 B M Option Nil None Bracket (For without flow adjustment valve) Series compatible

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) 1 set unit O-ring assembly 1 set unit VCC12-OR-1 O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 1 set unit VCC13-1A-1 VCC13-00 (dedicated) 1 set unit O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit VCC13-OR-2 Mounting nut

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Manifold Specifications

Porting specifications Port size A, B Stations Applicable valve model Base model Wiring A, B port P , EA, EB 2 to 16 stations Plug-in type VV5ZS3-51F VV5ZS3-51G With D-sub connector With attachment plug lead wire Rc , VZS350-FZ 1 8 1 4 Side C6 Rc 1 4 Grommet L plug connector M plug connector K plug connector G L M KZ Non plug-in type VV5ZS3-51 2 to 24 stations C8 VZS350VK With attachment

Manifold Specifications

Porting specifications 4(A), 2(B) port Port size Applicable valve model Base model Wiring 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6

Mechanically Jointed Rodless Cylinder Series MY1

1 1 1 Wa !! !! !! Wb !! !! !! Wc !! !! !! Wd !! !! !! & ' (' ' ) 3 Composite Center of Gravity Calculation m1 & m & > > > & 6.525 kg m X & -m x. & > > > . & 138.5 mm m Y & -m y. & > > > . & 29.6 mm m Z & -m z. & > > > . & 37.4 mm 4 Calculation of Load Factor for Static Load m1+ m m! -$! $ 7 9m. & -. : 0 ) $ # & !9m1max & 9 &0.08 M1+ !# m M1 max -$!

smcmaintenancepartslist

Quantity Note END100-005 END100-020 END110-005 END200-005 END200-020 END210-005 FN4102 1 1 1 1 1 1 5 m, Cylindrical type 20 m, Cylindrical type 5 m, Step type 5 m, Cylindrical type 20 m, Cylindrical type 5 m, Step type FN111 FN112 274 Low Maintenance Filter Series FN1/FN4 P.483 3 Replacement Procedure is Options (Sold separately) Reservoir tank: Series FNR Actuators Modular F.R.L.

2-Color Display High Precision

Symbol Lead wire length 3 m 1 -X501 Lead wire is 3 meters. How to Order Refer to How to Order on page 1 for standard specifications.

Compact Manifold Regulator Series ARM5

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 4 6 4 6 1/4 1/4 1/4 5/16 5/16 5/32 5/32 Symbol Symbol 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

modular-press-e

Description Material ARG40(K) AR40P-410S AR40P-150AS AR40P-050AS ARG40P-400S GB4-10AS ARG40P-420S ARG30(K) AR30P-410S AR30P-150AS AR30P-050AS ARG30P-400S GB3-10AS ARG30P-420S Valve Diaphragm assembly Valve guide assembly Pressure gauge cover Pressure gauge Note 1) 4 5 6 7 8 9 10 1 1 1 1 1 1 1 Brass, HNBR AR20P-410S AR30P-410S AR40P-410S Weather resistant NBR POM, NBR PC Stainless steel

Modular F.R.L. Pressure Control Equipment

Description Material ARG40(K) AR40P-410S AR40P-150AS AR40P-050AS ARG40P-400S GB4-10AS ARG40P-420S ARG30(K) AR30P-410S AR30P-150AS AR30P-050AS ARG30P-400S GB3-10AS ARG30P-420S Valve Diaphragm assembly Valve guide assembly Pressure gauge cover Pressure gauge Note 1) 4 5 6 7 8 9 10 1 1 1 1 1 1 1 Brass, HNBR AR20P-410S AR30P-410S AR40P-410S Weather resistant NBR POM, NBR PC Stainless steel

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are