3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

type plug connector (M): VQZ3 2(R)M -N7T, N9T, N11T, 02T 94.5 37 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 82.5 36 Body Ported Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) VV3QZ12C00T Stations Scale: 40% (5.5) (35) Grommet (G) (11) 27 24.5 Mounting holes n-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for

Compact Vacuum Unit

plug connector With lead wire Note 5) M 0 Without exhaust port 3 For manifold M-type plug connector Without connector Note 5) Silencer exhaust (Individual exhaust) MO No distinction Exhaust direction 1 Note 4) All with light and surge suppressor.

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3 m 5 m Assembly part no.

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate: K (with Operation

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: Y (None)

SZ3000

Co., Ltd. 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

SZ3000

Co., Ltd. 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

CM2

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed above, refer to page 6-4-24 for details.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch.

ISO Cylinder

Please contact SMC regarding water resistant types with the above model numbers. 2 1 m lead wire is only applicable to the D-A93. None N (Example) H7CN Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed above, refer to page 111 for details.

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

SMC Pneumatic Clean Series

Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

Modular Design with Uniform Body Style

V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

10

Nil A B C D E F G H K L Z Nil XB A B C D E F G H Note) A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J Nil A B C D E F G H K L Z Nil XB VX210 VX220 VX230 J Note) L Note) J Note) M Note) K Note) J Note) L Note) K Note) M Note) L Note) N Note) M Note) N Note