SMC Corporation of America
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Stepless control of air pressure proportional to an electrical signal Maximum supply pressure:5.0 MPa 5.0 MPa Power consumption 3 W or less 3 W or less Set pressure range:0.01 to 3.0 MPa 0.01 to 3.0 MPa Maximum flow rate:3000 L/min [ANR] 3000 L/min [ANR] Digital pressure display Supply pressure: 5.0 MPa Set pressure: 3.0 MPa Fluid: Air, N2, O2, Ar Air, N2, O2, Ar Wetted parts: Fluorine grease

Specifications Sleeve material Nylon Brass Fluid Air, N2, Water Turbine oil class(ISO VG32) Note 2) ,Note 3), Note 5) Air, N2 , Steam Turbine oil class(ISO VG32) Note 2) , Note 3) Ambient and fluid temperature -5 to 60oC (No freezing) Water: 0 to 60oC (No freezing) -5 to 150oC (No freezing) Operating pressure range Note 1 -101.3 kPa to 1 MPa Note 4) Proof pressure 7.0 MPa (at 60oC Lubricant

Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.

Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Order made Manifold spec. sheets 188 Order Made Specifications SY5000/7000/9000/SY500 DIN Connector (DIN 43650C Standard) DIN connector type with conformity

purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

Recovery of circulating fluid 1 2 3 Customers equipment Customers equipment Customers equipment Circulating pump Circulating pump Circulating pump Internal pump Internal pump Internal pump Option Option Option N2 purge port N2 purge port N2 purge port Heat exchanger Heat exchanger Heat exchanger Main tank Main tank Main tank N2 Circulating fluid electrical resistance ratio control function

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations 1.2-176 Order Made Specifications SY3000/5000/7000/9000 Body Ported Type with External Pilot Main Valve Fluoro Rubber Specification Energy Saving Solenoid

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500 24.1 1/4-20 UNC Screw For Panel Mounting Delivery pressure (MPa) Delivery pressure (psig) 20.7 3000 Max. 0.25 (6.4) Panel Thickness 17.2 2500 2000 13.8 To 6.88 (174.7) 1500 10.3 1000 6.9 500 3.4 0.75 (19.1) 0.50 (12.7) 3.84 (97.5) Min. 1.50 (38.1) 0 0.0 0 1000 2000 3000 4000 5000 6000 Flow rate (slpm, N2

n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

.: 3.5 to 7 Manual override (Non-locking) Pg7 ~ = 300 78.4 (Lead wire length) 70.9 4.5 7.5 44.5 R P 20 13.5 13 4 x Rc1/8 (Piping port) 40 4 x Rc1/8 (Piping port) Refer to grommet type for other dimensions. 1424 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Type 20 Manifold/Body ported (Top ported) VV5K3-20Station n1 = Number of VK3000 n2 = Number of VK300 Grommet: G DIN

Note 2) As an optional specification, the maximum number of stations can be increased by special wiring specifications. 654 B VQC5000 Series S VQC5000 Kit (Serial transmission kit): For EX600 Integrated-type (I/O) Serial Transmission System IP67 compliant VV5QC51 S kit (Serial transmission kit: EX600) Power supply with M12 connector L2 L1 47n2 + 82.5 5.5 4.4 10 8 26 47 x n2 47 59.5 P = 41

NVFR4000, plug-in and non plug-in types, Maximum operating pressure: 130 PSI, Ambient and fluid temperature: 32 120 F, Manual override: non locking push style, VALVE DBL PLUG-IN BASE MO *LQA, VALVE, VFR4000 SOL VALVE 4/5 PORT, 2Q, VFR4000, 2.05122 lb

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Voltage 1A 1B 1C 1U 1D 1E 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q

Please contact us for the latest version.sales@ocaire.com, VALVE DBL NON PLUG-IN BASE MT, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 2.71903 lb

Please contact us for the latest version.sales@ocaire.com, VALVE DBL NON PLUG-IN BASE MT, VALVE, VFS3000 SOL VALVE 4/5 PORT, 2Q, VFS3000, 1.87086 lb