Parallel Style Air Gripper Series MHZ

N2] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O O B A (mm) (mm) Model A 2.5 3 4 5 6 7 9 Model A 2.5 3 4 5 6 7 9 B 5 5.7 7 9 12 14 17 B 5 5.7 7 9 12 14 17 C 2 2 2.5 4 5 6 7 H 2.4 2.9 3.4 4.5 5.5 6.6 9 MM M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MHZ2-62 MHZ2-10 MHZ2-6 1 MHZ2-10 2 N2 2 N2 2 N2 2 N2 1 N1

High-Precision Digital Pressure Switch

outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1 T PNP open collector 2 outputs + Analog voltage output*1 V PNP open collector 2 outputs + Analog current output*1 X NPN open collector 2 outputs + Copy function Y PNP open collector 2 outputs + Copy function Symbol Description Nil Unit selection function*1 M SI unit only*2 P Unit selection function

Digital Flow Switch (Remote type monitor unit)

Setting of [F 0] Unit selection function completed -22No.PF-OMJ0018-F Flow specification when [ Ft] is selected by unit selection function Model PFM710 PFM725 PFM750 PFM711 Dry air, N2, Ar 0.8 to 35.3 1.8 to 88.3 4 to 177 8 to 353 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Rated flow range CO2 0.8 to 17.6 1.8 to 44.1 4 to 88 8 to 176 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Dry air, N2Ar

M Series

M-3AU(Except M-3AU-2) Approx. 1/4 rotations M-3N M-3P M3 M-3ALU-2 Approx. 1/3 rotations M-3ALU(Except M-3ALU-2) Approx. 1/2 rotations M-3UL M-3UT M-5AUM-5ANM-5HApprox. 1/6 to 1/4 rotations Note) M-5J M-5N M-5UN M-5P M-5ALUM-5ALNM-5ALHUM-5ALHNApprox. 1/2 rotations Note) M-5HLM-5HLHM-5UL Note) As a guideline, the tightening torque should be 1 to 1.5 Nm.

ZSM1-115/121

It may result in a malfunction or damage. 2. Operating fluids are either air or inert gas exclusively.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: C8 (8mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N7 (1/4 inch), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA)

Table of Contents

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

A_HEC-OM-K001

Air is sucked in from the controller side and discharged through the back via this fan. (9) Fan (Outlet of air) 2.1 Temperature Controller 2-1 A_HEC-OM-K001-1.7 Chapter 2 Description and Function of Each Part 2.2 Heat Exchanger (5) (6) (8) (2) (7) (4) (1) (3) Fig.2-2 Heat Exchanger Table 2-2 Heat Exchanger No. Name Description Inlet port of chemicals.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube

New

Application example Laser beam machine O2 Air High pressure N2 Series ITVX CAT.ES60-21A 5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator Series ITVX2000 RoHS How to Order ITVX2 0 3 0 S 0 1 3 Body size Pressure display unit 2 ITVX2000 Nil MPa 2 3 4 Note) kgf/cm2 bar Pilot style Note) psi 0 Built-in regulator type Note) Note) Under Japan's new Measurement Note) For

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

5 Port Solenoid Valve

VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port VFS 2 x M12 M5 x 0.8 Ground screw 4 x M8 VFR 117 B B 2 B 2 B 2 B 2 2 B B 2 2 0 0 BUS 19 3 1 69 55.5 53.7 1 60 12 X 51 1 2 VQ7 PWR 3 A 4 A 4 A 4 A 4 A 4 A 4 A 4 22 17 15.5 34 2 x M12 M3 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Note) The dimensions

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Refrigerated Thermo-chiller

Recovery of circulating fluid 1 2 3 Customers equipment Customers equipment Customers equipment Circulating pump Circulating pump Circulating pump Internal pump Internal pump Internal pump Option Option Option N2 purge port N2 purge port N2 purge port Heat exchanger Heat exchanger Heat exchanger Main tank Main tank Main tank N2 Circulating fluid electrical resistance ratio control function

VK3000

VK300-82-2-01 100 VAC V100 VK300-82-2-03 110V 110 VAC 200 VAC 220 VAC VK300-82-2-02 200V VK300-82-2-04 220V S070 240V 6V 12V 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal VQD VQD-V Light (Built-in connector) Marking Circuit with light AC Circuit diagram 12 VDC or less Circuit diagram 24 VDC or more Circuit

KT10

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

KFx-OMV0007

Specifications Sleeve material Nylon Brass Fluid Air, N2, Water Turbine oil class(ISO VG32) Note 2) ,Note 3), Note 5) Air, N2 , Steam Turbine oil class(ISO VG32) Note 2) , Note 3) Ambient and fluid temperature -5 to 60oC (No freezing) Water: 0 to 60oC (No freezing) -5 to 150oC (No freezing) Operating pressure range Note 1 -101.3 kPa to 1 MPa Note 4) Proof pressure 7.0 MPa (at 60oC Lubricant