Compact Cylinder/Guide Rod Type Series CQM

1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 Rc 1/4 NPT 1/4 G 1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc 1/4 NPT 1/4 G 1/4 75, 100 60.5 40.5 Bore size (mm) 32 40 50 V W HA OA HB IA IB J KA KB L M N OB RA RB Z +0.2 0 38 10 5 60 58.5 4.5 28 0.2 19.8 7 34 5.5 9 10 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 46 10 10 5 69 67.5 5 33 0.2 23.3 7 40 5.5 9 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 58 12 6 86 84.5 7

Compact Cylinder with Air Cushion Series RQ

8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

RQ

For detailed specifications, refer to page 7-9-1.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1 !6 !

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 3 DI2 1 0 1 Program No. 6 DI-1 1 1 0 Program No. 7 1 1 1 Program No. 8 Note. 0: off 1: on Program input 1 PI1 Turn PI1 on to resume the step stopped by the SINK (1) command in the program.

VEX1

(600mm lead wire) DIN connector DIN connector(Without connector) 2 01 1 8 1 8 H D DO Base mounted 02 1 4 1 4 Model Operating style Air operated External pilot solenoid P,A port , Port size Rc(PT) R port Model , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 1 2 , 1 1 2 3 4 11 4 2 1 VEX1100 VEX1101 1 8 1 4 , VEX1200 1 8 1 4 , , VEX1300 1 4 3 8 1 2 1 1 2 , 3 4 , VEX1500 1, 1 VEX1700 1 4 1, VEX1900 VEX1201 VEX1301

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following

IP80-OM00019

) 9 4. 23 10 A * 3-1-2 3 2 IP8000 OUT2 OUT1 () * OUT2 OUT1 * 11 A * 3-2-3 DA RA DA RA 3 IP8000 OUT1 OUT2 RA DA OUT1 OUT2 * * 12 5. 5-1 2M4 M4 (1) (+)(-) (+) (-) G1/216.5mm (2.636.64 mm2) (2) 14A B( B), M4 14 5-2 (1) (+)(-) (+) (-) G1/220mm G(PF)1/2 (0.51.5mm2) M4 (2.636.64mm2 ) 15 13 6.

CQS

5 5 1 Made to Order Note 1) Consult SMC for shorter stroke length than indicated in the table.

Flow ranges (lpm): 10-100; Port sizes: 25A (32mm O.D.) ; Temperature rating: 0-70°C; Output options: NPN/PNP, (switch); 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.

BP1000

) Operation Warning 1.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

Table of Contents

1 !

Smooth Cylinder/Low Speed Cylinder

Caution 1.

2-Color Display Digital Flow Switch Series PFM

Piping Variations PFM Female thread: Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8, 1/4 One-touch fitting: 4, 6, 8, 1/4 Bottom Straight Bottom Straight PFMV Without flow adjustment With flow adjustment PF2A S S 1 2 1 2 S S 1 1 2 2 PF2W PF2D IN 1 IN 1 IN IN IF S S 1 2 S 1 2 S 1 2 1 2 IN IN 1 IN IN 1 Mounting Bracket Bottom mounting Panel mount DIN rail Through-hole mounting 901 Main Functions Selection

Flow Sensor Series PFMV

Ra Ru Rh Rd Flow (b) The gas flows from the left side. 953 Series PFMV5 Analog Output (Non-linear output) PFMV505-1 PFMV510-1 PFMV530-1 5.0 5.0 5.0 4.5 4.5 4.5 4.0 4.0 4.0 Analog output voltage [V] Analog output voltage [V] Analog output voltage [V] 3.5 3.5 3.5 3.0 3.0 3.0 2.5 2.5 2.5 2.0 2.0 2.0 1.5 1.5 1.5 1.0 1.0 1.0 0.5 0.5 0.5 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.00 0.1

2–4

Insulation resistance 50 M or more at 500 VDC (between lead wire and case) 1500 VAC for 1 min. Note 1) (between lead wire and case) 1000 VAC for 1 min.

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.