V

This controls the passage of air bled from the P o r p r e s s u r e p o r t o f t h e v a l v e . T h e m a i n v a l v e i s p n e u m a t i c a l l y o p e r a t e d b y t h i s a i r, switched by the solenoid.

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Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

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L R L R Note) L: U side mount R: D side mount EXH block disk When valve exhaust affects the other stations in the circuit, insert EXH block disk in between stations to separate valve exhaust. Body type Plug-in type Non plug-in type AXT625-12A Part no.

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R A A A A A R P R 14 19.5 11 10 30.7 31.5 29 52.9 [55.1] 53.7 [55.9] B B B B B M5 x 0.8 (P, R port) 2 x 3.5 (For mounting) M3 x 0.5 (A, B port) L2 3.5 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + + 42 [49] 26.6 13.5 L plug connector (L) M plug connector (M) M8 connector (WO) (Lead wire length) Approx. 300 42 [49] 26.6 M8 x 1 53.1 [60.1] Approx. 300 (Lead wire length

SQ1000/2000

L RUN SERIAL UNIT L ERR.

Electric Actuators

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l SYJ524-l SYJ524M-l How to Order SS3YJ5--40-05 -M5 R Port

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Value in the initial stage) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position prssure center 3 position prssure center (B) 2 (A) 4 (B) 2 (A) 4 Solenoid Specifications 1 (P) 3 (R) 5 (R) Grommet(G)/(H), L plug connector(L), M plug connector(M) 1 (P) 3 (R) Electrical entry 24, 12, 6, 5, 3 100, 110, 200, 220 DC AC50/60Hz Coil

SYJ3000/5000/7000

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol 5 port 4 port (manifold) Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) 2 position single 2 position single Electrical entry (B) 2 (A) 4 (B) 2 (A) 4 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC 50/60 Hz 1 (P) 1 (P) 3 (R) 3 (R) 5 (R) Allowable voltage fluctuation

Table of Contents

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

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How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

KJ

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.