Flow Range: 20 (2~16 l/min), Thread: N (NPT Thread), Port Size: 04 (1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 2~16 l/min, Thread: G thread, Port Size: 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: Rc, Port Size: 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: Rc, Port Size: 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: Rc, Port Size: 1/2, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: Rc, Port Size: 1/2, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: G thread, Port Size: 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: G thread, Port Size: 1/2, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: G thread, Port Size: 1/2, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: NPT Thread, Port Size: 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: NPT Thread, Port Size: 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Flow Range: 2~16 l/min, Thread: NPT Thread, Port Size: 1/2, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (1~5V)

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Precision Regulator Series IR1000/2000/3000

IR3000 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Pressure gauge reverse mounted R Connection NPT 1/8 N01 Series IR2000 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 Series IR1000 Modular and Accessory Combinations

IR1000/2000/3000

2 Series IR3000 Connection Rc(PT) 1/8 01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G

S Couplers

4") 8 (1/4") 9 (3/8") 12 (1/2") Applicable hose I.D.