VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5
Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-89 kPa), SUP: F03 (Screw-in G 3/8), VAC: F03 (Screw-in G 3/8)
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: F02 (Screw-in G1/4), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8)
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F02 (Screw-in G1/4), VAC: F03 (Screw-in G3/8), EXH: F03 (Screw-in G3/8)
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22
Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-90 kPa), SUP: F03 (Screw-in G3/8), VAC: F04 (Screw-in G1/2), EXH: F04 (Screw-in G1/2)
Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-90 kPa), SUP: F03 (Screw-in G3/8), VAC: F04 (Screw-in G1/2), EXH: F04 (Screw-in G1/2), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F03 (Screw-in G3/8), VAC: F04 (Screw-in G1/2), EXH: F04 (Screw-in G1/2)
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
Flow Range: 11 (10~100 l/min), Thread: Rc, Port Size: 03 (Port Size 3/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))
Flow Range: 11 (10~100 l/min), Thread: Rc, Port Size: 03 (Port Size 3/8), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))
Flow Range: 11 (10~100 l/min), Thread: F (G thread), Port Size: 03 (Port Size 3/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))
Flow Range: 11 (10~100 l/min), Thread: N (NPT Thread), Port Size: 03 (Port Size 3/8), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))
Flow Range: 11 (10~100 l/min), Thread: N (NPT Thread), Port Size: 03 (Port Size 3/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))
Flow Range: 10~100 l/min, Thread: Rc, Port Size: Port Size 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (4~20mA)
Flow Range: 10~100 l/min, Thread: Rc, Port Size: Port Size 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (4~20mA)
Flow Range: 10~100 l/min, Thread: G thread, Port Size: Port Size 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (4~20mA)
Flow Range: 10~100 l/min, Thread: NPT Thread, Port Size: Port Size 3/8, Wiring Specification: 3m Lead Wire w/Connector, Output Specification: Pulse Output + Analog Output (4~20mA)
Flow Range: 10~100 l/min, Thread: NPT Thread, Port Size: Port Size 3/8, Wiring Specification: w/o Lead Wire, Output Specification: Pulse Output + Analog Output (4~20mA)
Assembly Environment: P (Clean Room), Operation: 0 (Automatic Operation Type), Connection Size: F03 (G3/8, G1/4)